Problem karlsuss2 SNF 2009-10-08 11:43:40: Software limits XY wafer travel

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 8 14:38:15 PDT 2009


There are X/Y alarm limits for WEC/wafer movement in relation to BSA microscopes. If the BSA microscopes are at their extreme outer limits, there will be software alarms imposed on the WEC to prevent the WEC head from crashing into the BSA microscope probes. To resolve the issue, the user must activate the BSA microscopes and move them independantly with thte left and right buttons to the center position. This will restore full range of motion to the WEC head for wafer positioning. Showed user how to do this. System is up and running.




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