From dpb167 at snf.stanford.edu Fri Apr 2 09:43:17 2010 From: dpb167 at snf.stanford.edu (dpb167 at snf.stanford.edu) Date: Fri, 2 Apr 2010 09:43:17 -0700 Subject: Problem karlsuss2 SNF 2010-04-02 09:43:17: soft stop issue on BSA microscope Message-ID: The right BSA microscope seemed to be encountering a soft stop well before the hard stop so that I couldn't reach my BSA alignment marks. The left microscope is capable of going almost to the center while the right microscope stops at least a centimeter further from the center. I was able to perform the BSA on karlsuss but not karlsuss2. From vilanova at snf.stanford.edu Fri Apr 2 11:22:54 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Apr 2010 11:22:54 -0700 Subject: Problem karlsuss2 SNF 2010-04-02 09:43:17: soft stop issue on BSA microscope Message-ID: BSA MIcroscope reach the end of limits therefore the BSA wasnt working properly or working at all., I initialized the system and check Left and right BSA and they are working Fine ,If the BSA microscope (Either one of them ) gets moved out of the limit it gets stock , this is why the system beeps and warns you that the "BSA reach end Limit" so Scope has to be moved back home position , Also checked the Grab Image and system was working fine for me, Ok to use. From damodei at snf.stanford.edu Tue Apr 6 02:05:16 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 6 Apr 2010 02:05:16 -0700 Subject: Problem karlsuss2 SNF 2010-04-06 02:05:16: Tube for small mask holder has a hole in it Message-ID: Not pulling vacuum, there's a big hole in the tube. From vilanova at snf.stanford.edu Tue Apr 6 08:37:56 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Apr 2010 08:37:56 -0700 Subject: Problem karlsuss2 SNF 2010-04-06 02:05:16: Tube for small mask holder has a hole in it Message-ID: repaired broken vacuum tubing , cleaned mask plate holder and tested, Vacuum Ok , Good to Use. . From gsosa at snf.stanford.edu Thu Apr 15 08:37:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 15 Apr 2010 08:37:05 -0700 Subject: Comment karlsuss2 SNF 2010-04-15 08:37:04: Scheduled lamp change 4/15 Message-ID: Replaced lamp and adjusted lamp poisition for maximum intensity. Calibrated lamp P/S for 15.0 Mw/cm2. Uniformity @ 1.3% From mahnaz at snf.stanford.edu Mon Apr 19 12:28:25 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 19 Apr 2010 12:28:25 -0700 Subject: Problem karlsuss2 SNF 2010-04-19 12:28:25: loss of focus Message-ID: During during audit of the E341 class every times ( 4 total) when the wafer was loaded the focus loss on mask is huge From mahnaz at snf.stanford.edu Mon Apr 19 12:42:40 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 19 Apr 2010 12:42:40 -0700 Subject: Problem karlsuss2 SNF 2010-04-19 12:42:39: mask holder stage cover Message-ID: Needs to be replaced, it does not look good. Please order few extra one as ks1 might need one soon as well. From vilanova at snf.stanford.edu Mon Apr 19 14:29:03 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Apr 2010 14:29:03 -0700 Subject: Problem karlsuss2 SNF 2010-04-19 12:42:39: mask holder stage cover Message-ID: replaced mask holde cover, For the maskholder for Suss # 1 We have to wait part is on order. From jennyhu at snf.stanford.edu Sun Apr 25 16:18:44 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Sun, 25 Apr 2010 16:18:44 -0700 Subject: Problem karlsuss2 SNF 2010-04-25 16:18:43: Poor Alignment Message-ID: Repeated poor alignment on samples (small pieces) that is shifted or rotated much more than within user error (>5um). The sample position sometimes shifts a little each time I move in and out of contact. My samples have blue tape on the back for better vacuum, and they are in contact mode right before I press expose. Perhaps the vacuum is not very good so the sample moves a little during exposure? KS1 is down now so it's hard to check if it is the piece chuck or KS2. From jennyhu at snf.stanford.edu Sun Apr 25 16:20:29 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Sun, 25 Apr 2010 16:20:29 -0700 Subject: Comment karlsuss2 SNF 2010-04-25 16:20:28: Poor Alignment cont. Message-ID: The alignment problem was also experienced by another user who works with pieces using the piece chuck on KS2. From sroonter at snf.stanford.edu Mon Apr 26 16:34:45 2010 From: sroonter at snf.stanford.edu (sroonter at snf.stanford.edu) Date: Mon, 26 Apr 2010 16:34:45 -0700 Subject: Comment karlsuss2 SNF 2010-04-26 16:34:45: misalignment on pieces Message-ID: Used the piece chuck like always, but 4 out of 5 of samples were misaligned by 5um at most. It seems that the top left corner is misaligned worse than the other corners, which implies that the sample was rotated CC. (usually 1 out o 5 samples would shift in x or y direction, but never did they rotate like this time) From tdo at snf.stanford.edu Thu Apr 29 16:23:15 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 29 Apr 2010 16:23:15 -0700 Subject: Problem karlsuss2 SNF 2010-04-29 16:23:14: same alignment problem on pieces as reported by jennyhu Message-ID: In soft vacuum / contact, alignment looks good, but after exposure it appears the sample has rotated slightly since one corner looks good and the other misaligned by 5um+ From mahnaz at snf.stanford.edu Fri Apr 30 13:49:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 Apr 2010 13:49:51 -0700 Subject: Problem karlsuss2 SNF 2010-04-30 13:49:50: BSA focus totally out Message-ID: Tried to help few student with BSA the focus is totally out. Decided to finish the work with KS FSE on KS1 first. From mahnaz at snf.stanford.edu Fri Apr 30 17:30:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 Apr 2010 17:30:41 -0700 Subject: Comment karlsuss2 SNF 2010-04-30 17:30:40: FSE visit Message-ID: There will be a visit from KS fse next week to work on BSA and focus issues.