Problem karlsuss2 SNF 2010-04-19 12:28:25: loss of focus

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Apr 19 12:28:25 PDT 2010

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During during audit of  the E341 class every times ( 4 total) when the wafer was loaded the focus loss on mask is huge

Previous message: Comment karlsuss2 SNF 2010-04-15 08:37:04: Scheduled lamp change 4/15
Next message: Problem karlsuss2 SNF 2010-04-19 12:42:39: mask holder stage cover
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