Problem karlsuss2 SNF 2010-04-29 16:23:14: same alignment problem on pieces as reported by jennyhu

tdo at snf.stanford.edu tdo at snf.stanford.edu
Thu Apr 29 16:23:15 PDT 2010

Previous message: Comment karlsuss2 SNF 2010-04-26 16:34:45: misalignment on pieces
Next message: Problem karlsuss2 SNF 2010-04-30 13:49:50: BSA focus totally out
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

In soft vacuum / contact, alignment looks good, but after exposure it appears the sample has rotated slightly since one corner looks good and the other misaligned by 5um+

Previous message: Comment karlsuss2 SNF 2010-04-26 16:34:45: misalignment on pieces
Next message: Problem karlsuss2 SNF 2010-04-30 13:49:50: BSA focus totally out
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the karlsuss2-pcs mailing list