Problem karlsuss2 SNF 2010-04-29 16:23:14: same alignment problem on pieces as reported by jennyhu

tdo at snf.stanford.edu tdo at snf.stanford.edu
Thu Apr 29 16:23:15 PDT 2010


In soft vacuum / contact, alignment looks good, but after exposure it appears the sample has rotated slightly since one corner looks good and the other misaligned by 5um+




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