From faridz at snf.stanford.edu  Mon Jun  7 18:23:40 2010
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Mon, 7 Jun 2010 18:23:40 -0700
Subject: Problem karlsuss2 SNF 2010-06-07 18:23:39: unable to align due to bad focus 
Message-ID: <mailman.760.1356281964.4015.karlsuss2-pcs@snf.stanford.edu>

both optical focus is very bad cant focus mask and wafer at the same time. unable to align my wafers. please check



From mahnaz at snf.stanford.edu  Tue Jun  8 11:09:01 2010
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 8 Jun 2010 11:09:01 -0700
Subject: Problem karlsuss2 SNF 2010-06-08 11:09:01: right focus out
Message-ID: <mailman.761.1356281964.4015.karlsuss2-pcs@snf.stanford.edu>

worked with farid hom few wafers went through just fine but last wafer 
right side could not focus both mask and wafer., hard to do alignment.



From mahnaz at snf.stanford.edu  Mon Jun 14 11:41:43 2010
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Mon, 14 Jun 2010 11:41:43 -0700
Subject: Comment karlsuss2 SNF 2010-06-14 11:41:42: replaced the broken blanket mask
Message-ID: <mailman.762.1356281964.4015.karlsuss2-pcs@snf.stanford.edu>




From yinliu at snf.stanford.edu  Fri Jun 18 02:24:55 2010
From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu)
Date: Fri, 18 Jun 2010 02:24:55 -0700
Subject: Problem karlsuss2 SNF 2010-06-18 02:24:55: even hold contact, wafer still move.
Message-ID: <mailman.763.1356281964.4015.karlsuss2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue Jun 22 09:12:17 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 22 Jun 2010 09:12:17 -0700
Subject: Comment karlsuss2 SNF 2010-06-22 09:12:16: Scheduled lamp change 6/22
Message-ID: <mailman.764.1356281964.4015.karlsuss2-pcs@snf.stanford.edu>

Replaced and set up UV lamp.
Calibrated intensity to 15.0 mw/cm2
Uniformity: 1.34%