Problem karlsuss2 SNF 2010-06-08 11:09:01: right focus out

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Jun 8 11:09:01 PDT 2010


worked with farid hom few wafers went through just fine but last wafer 
right side could not focus both mask and wafer., hard to do alignment.




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