From altamash at snf.stanford.edu Sat May 1 16:48:22 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 1 May 2010 16:48:22 -0700 Subject: Comment karlsuss2 SNF 2010-05-01 16:48:21: significant alignment issues Message-ID: From faridz at snf.stanford.edu Tue May 4 10:46:26 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 4 May 2010 10:46:26 -0700 Subject: Problem karlsuss2 SNF 2010-05-04 10:46:25: loss of vacuum warning before expose Message-ID: tool is showing loss of vacuum right before expose " loss of vacuum press enter to ignor" please check. From vilanova at snf.stanford.edu Tue May 4 15:02:51 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 May 2010 15:02:51 -0700 Subject: Problem karlsuss2 SNF 2010-05-04 10:46:25: loss of vacuum warning before expose Message-ID: vacuum working fine, checked , maybe the chuck was dirty maybe someone use tape to use it for pieces, and they did not clean it up after use. Cleaned the Chuck with I sopropyl and tested ok to use. From vilanova at snf.stanford.edu Wed May 5 10:05:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 May 2010 10:05:01 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-05 10:05:00: Suss ENg. Is here.. Message-ID: Suss FSE is here to work on some of the Alignment Issues. Sorry for the Inconvinience but we have to take over both machines. From mahnaz at snf.stanford.edu Wed May 5 15:23:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 May 2010 15:23:50 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-05 10:05:00: Suss ENg. Is here.. Message-ID: BSA focus totally out so KS fse decided to work on ks and work on the ks2 tomorrow. He will be back with another fse more familiar with BSA. Sysytem ok for top side non critical use. Please run a test wafer before committing your wafers. From vilanova at snf.stanford.edu Thu May 6 08:59:35 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 May 2010 08:59:35 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-06 08:59:34: FSE guys are here ...... Message-ID: From mahnaz at snf.stanford.edu Thu May 6 17:00:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 17:00:15 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-06 08:59:34: FSE guys are here ...... Message-ID: I will send out the report tomorrow , please report anyy issues on coral. From mahnaz at snf.stanford.edu Fri May 7 11:25:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:25:51 -0700 Subject: Problem karlsuss2 SNF 2010-04-30 13:49:50: BSA focus totally out Message-ID: We only got to spend few hours on the tool on to top it off the mask Karlsuss has to check front to back alignment Broke by the KS fse. We did test the focus for BSA and found that we can focus it. the top side focus on the right side drifted on 10X . No time to work on that. On the issue of the samples are moved after they are contacted , they checked Nitrogen flow, nitrogen presser and WEC presser some got adjusted some left as it was per my request. Please report any issues with the system on Coral and let us know of any issues. From mahnaz at snf.stanford.edu Fri May 7 11:26:00 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:00 -0700 Subject: Comment karlsuss2 SNF 2010-04-30 17:30:40: FSE visit Message-ID: We only got to spend few hours on the tool on to top it off the mask Karlsuss has to check front to back alignment Broke by the KS fse. We did test the focus for BSA and found that we can focus it. the top side focus on the right side drifted on 10X . No time to work on that. On the issue of the samples are moved after they are contacted , they checked Nitrogen flow, nitrogen presser and WEC presser some got adjusted some left as it was per my request. Please report any issues with the system on Coral and let us know of any issues. From mahnaz at snf.stanford.edu Fri May 7 11:26:11 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:11 -0700 Subject: Problem karlsuss2 SNF 2010-04-29 16:23:14: same alignment problem on pieces as reported by jennyhu Message-ID: We only got to spend few hours on the tool on to top it off the mask Karlsuss has to check front to back alignment Broke by the KS fse. We did test the focus for BSA and found that we can focus it. the top side focus on the right side drifted on 10X . No time to work on that. On the issue of the samples are moved after they are contacted , they checked Nitrogen flow, nitrogen presser and WEC presser some got adjusted some left as it was per my request. Please report any issues with the system on Coral and let us know of any issues. From mahnaz at snf.stanford.edu Fri May 7 11:26:21 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:21 -0700 Subject: Problem karlsuss2 SNF 2010-04-25 16:18:43: Poor Alignment Message-ID: We only got to spend few hours on the tool on to top it off the mask Karlsuss has to check front to back alignment Broke by the KS fse. We did test the focus for BSA and found that we can focus it. the top side focus on the right side drifted on 10X . No time to work on that. On the issue of the samples are moved after they are contacted , they checked Nitrogen flow, nitrogen presser and WEC presser some got adjusted some left as it was per my request. Please report any issues with the system on Coral and let us know of any issues. From mahnaz at snf.stanford.edu Fri May 7 11:26:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:30 -0700 Subject: Problem karlsuss2 SNF 2010-04-19 12:28:25: loss of focus Message-ID: We only got to spend few hours on the tool on to top it off the mask Karlsuss has to check front to back alignment Broke by the KS fse. We did test the focus for BSA and found that we can focus it. the top side focus on the right side drifted on 10X . No time to work on that. On the issue of the samples are moved after they are contacted , they checked Nitrogen flow, nitrogen presser and WEC presser some got adjusted some left as it was per my request. Please report any issues with the system on Coral and let us know of any issues. From mahnaz at snf.stanford.edu Fri May 7 11:26:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:41 -0700 Subject: Comment karlsuss2 SNF 2010-02-10 09:19:33: Scheduled lamp change Message-ID: From mahnaz at snf.stanford.edu Fri May 7 11:26:58 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:26:58 -0700 Subject: Comment karlsuss2 SNF 2010-04-25 16:20:28: Poor Alignment cont. Message-ID: noted From mahnaz at snf.stanford.edu Fri May 7 11:27:07 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:27:07 -0700 Subject: Comment karlsuss2 SNF 2010-04-26 16:34:45: misalignment on pieces Message-ID: noted From mahnaz at snf.stanford.edu Fri May 7 11:27:21 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:27:21 -0700 Subject: Comment karlsuss2 SNF 2010-05-01 16:48:21: significant alignment issues Message-ID: noted From svo at snf.stanford.edu Fri May 7 12:31:06 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Fri, 7 May 2010 12:31:06 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 12:31:05: be careful! problem still Message-ID: when it says loss of vaccuum and u press enter: it says over current and if u press enter, ur mask will fall! the system then resets!!!! From svo at snf.stanford.edu Fri May 7 12:45:07 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Fri, 7 May 2010 12:45:07 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-07 12:45:07: Message-ID: From svo at snf.stanford.edu Fri May 7 12:46:07 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Fri, 7 May 2010 12:46:07 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 12:46:06: Message-ID: even w/o loss of vaccuum system is still resetting on me... From vilanova at snf.stanford.edu Fri May 7 13:53:56 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 May 2010 13:53:56 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 12:31:05: be careful! problem still Message-ID: checked mask holder vacuum hose , I tried to repeat the overcurrent issue but it was not happening to me, So make sure the mask is clean , I exposed a couple of wafers with no problem At all. From vilanova at snf.stanford.edu Fri May 7 13:54:02 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 May 2010 13:54:02 -0700 Subject: Shutdown karlsuss2 SNF 2010-05-07 12:45:07: Message-ID: checked mask holder vacuum hose , I tried to repeat the overcurrent issue but it was not happening to me, So make sure the mask is clean , I exposed a couple of wafers with no problem At all. From vilanova at snf.stanford.edu Fri May 7 13:54:10 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 May 2010 13:54:10 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 12:46:06: Message-ID: checked mask holder vacuum hose , I tried to repeat the overcurrent issue but it was not happening to me, So make sure the mask is clean , I exposed a couple of wafers with no problem At all. From tdo at snf.stanford.edu Fri May 7 13:57:21 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Fri, 7 May 2010 13:57:21 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 13:57:21: Pieces alignment issue has not been verified Message-ID: Please keep this problem active until it's qualified OK for pieces: Previous reported problem is that when using the piece chuck for wafer pieces, although the alignment looks good in contact (using soft vacuum), there is a ~5um shift when exposed and developed. From tdo at snf.stanford.edu Thu May 13 11:25:26 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 13 May 2010 11:25:26 -0700 Subject: Problem karlsuss2 SNF 2010-05-13 11:25:25: Still have alignment problem on pieces chuck Message-ID: I still observed the same problem with alignment using the pieces chuck: it is aligned when in contact, but after exposure and development, it appears the chip rotated to cause a 5um+ misalignment. Does anyone have this problem on whole wafers? From mahnaz at snf.stanford.edu Fri May 14 09:41:49 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 14 May 2010 09:41:49 -0700 Subject: Problem karlsuss2 SNF 2010-05-14 09:41:48: alignment shift Message-ID: There is an intermittent alignment issues with both pieces and 4" wafers. I have send all the complains to Karlsuss and asked for a field service engineer visit. As I have mentioned last week, they did not get a chance to spend too much time on the tool because it took too much time to trouble shoot KS1. But I like to remind every one that when we tested the system we did not see the issues but the system was flagged by me in February for the alignment issue so I am aware of it. From faridz at snf.stanford.edu Fri May 14 15:39:04 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 14 May 2010 15:39:04 -0700 Subject: Comment karlsuss2 SNF 2010-05-14 15:39:03: No alignment issues Message-ID: I ran six 4" wafers with 4um resist i did not experience any alignment issues. wafers came out with perfect alignemnt. please clean your chuck before exposing your wafers it might help. From gsosa at snf.stanford.edu Tue May 18 09:51:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 May 2010 09:51:33 -0700 Subject: Comment karlsuss2 SNF 2010-05-18 09:51:32: Scheduled lamp change 5/18 Message-ID: Replaced UV lamp. Peaked lamp intensity. Calibrated lamp Power supply for 15 Mw/cm2. Uniformity @ 2.0% From lindaw at snf.stanford.edu Wed May 19 11:13:26 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 19 May 2010 11:13:26 -0700 Subject: Comment karlsuss2 SNF 2010-05-19 11:13:24: 4" wafer alignment ok Message-ID: I exposed 8 4" wafers. The alignment is spot on. When I align, I check the alignment using the "alignment check" button directly below the "exposure" button. This brings the wafer into soft/hard contact (depending on the program chosen), and any shift can be seen and corrected for by pressing the "alignment check" button to release and re align to adjust for any shift. Repeat until you are satisfied with the alignment, then hit expose while wafers are aligned in contact with the mask. If you are using the "align cont/exp" button (above the arrow buttons) to check your alignment, and then hit expose, you may see a shift, but only after development. I advise trying to do the pieces and use the "alignment check" button to check alignment before exposure. Hope that helps. From lindaw at snf.stanford.edu Fri May 21 14:41:41 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 21 May 2010 14:41:41 -0700 Subject: Problem karlsuss2 SNF 2010-05-21 14:41:39: lamp power supply beeping, 14.7mW Message-ID: From gsosa at snf.stanford.edu Fri May 21 15:40:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 May 2010 15:40:18 -0700 Subject: Problem karlsuss2 SNF 2010-05-21 14:41:39: lamp power supply beeping, 14.7mW Message-ID: Checked and adjusted lamp position. Checked and calibrated lamp power supply for 15.0 Mw/cm2 From xhlim at snf.stanford.edu Tue May 25 18:52:27 2010 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Tue, 25 May 2010 18:52:27 -0700 Subject: Comment karlsuss2 SNF 2010-05-25 18:52:26: Alignment of pieces Message-ID: I aligned 5 samples today. 2 out of the 5 pieces were misaligned, shifted about 5 microns away from where I aligned and checked their position during contact (using the decrease Sep button till 0). I did the same thing for all 5 pieces, and 3 came out perfectly aligned, 2 were distinctly shifted.