Problem karlsuss2 SNF 2010-05-07 13:57:21: Pieces alignment issue has not been verified

tdo at snf.stanford.edu tdo at snf.stanford.edu
Fri May 7 13:57:21 PDT 2010


Please keep this problem active until it's qualified OK for pieces:
Previous reported problem is that when using the piece chuck for wafer pieces, although the alignment looks good in contact (using soft vacuum), there is a ~5um shift when exposed and developed.  




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