Problem karlsuss2 SNF 2010-05-13 11:25:25: Still have alignment problem on pieces chuck

tdo at snf.stanford.edu tdo at snf.stanford.edu
Thu May 13 11:25:26 PDT 2010


I still observed the same problem with alignment using the pieces chuck:  it is aligned when in contact, but after exposure and development, it appears the chip rotated to cause a 5um+ misalignment.  
Does anyone have this problem on whole wafers?




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