Comment karlsuss2 SNF 2010-05-14 15:39:03: No alignment issues

faridz at snf.stanford.edu faridz at snf.stanford.edu
Fri May 14 15:39:04 PDT 2010


I ran six 4" wafers with 4um resist i did not experience any alignment issues. wafers came out with perfect alignemnt. please clean your chuck before exposing your wafers it might help. 




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