From mahnaz at snf.stanford.edu Wed Nov 3 11:30:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:30:09 -0700 Subject: Problem karlsuss2 SNF 2009-11-24 14:38:57: BSA focus out Message-ID: During shut down pm was done. From mahnaz at snf.stanford.edu Wed Nov 3 11:30:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:30:38 -0700 Subject: Problem karlsuss2 SNF 2009-12-08 11:00:51: Backside Alignment Message-ID: From mahnaz at snf.stanford.edu Wed Nov 3 11:31:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:31:57 -0700 Subject: Problem karlsuss2 SNF 2010-05-07 13:57:21: Pieces alignment issue has not been verified Message-ID: System got pm and looked at by KS fse. WEC rebuild as well. From mahnaz at snf.stanford.edu Wed Nov 3 11:34:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:34:50 -0700 Subject: Problem karlsuss2 SNF 2010-05-14 09:41:48: alignment shift Message-ID: alignment using the "alignment check" button directly below the "exposure" button. This brings the wafer into soft/hard contact (depending on the program chosen), and any shift can be seen and corrected for by pressing the "alignment check" button to release and re align to adjust for any shift. Repeat until you are satisfied with the alignment, then hit expose while wafers are aligned in contact with the mask. If you are using the "align cont/exp" button (above the arrow buttons) to check your alignment, and then hit expose, you may see a shift, but only after development. I advise trying to do the pieces and use the "alignment check" button to check alignment before exposure. Hope that helps. From mahnaz at snf.stanford.edu Wed Nov 3 11:35:47 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:35:47 -0700 Subject: Problem karlsuss2 SNF 2010-06-07 18:23:39: unable to align due to bad focus Message-ID: I think we resolved this, not able to remeber it . From mahnaz at snf.stanford.edu Wed Nov 3 11:36:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:36:15 -0700 Subject: Problem karlsuss2 SNF 2010-06-08 11:09:01: right focus out Message-ID: Not remebering it but is fixed now. From mahnaz at snf.stanford.edu Wed Nov 3 11:36:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:36:35 -0700 Subject: Problem karlsuss2 SNF 2010-06-18 02:24:55: even hold contact, wafer still move. Message-ID: taken care of. From mahnaz at snf.stanford.edu Wed Nov 3 13:54:07 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 13:54:07 -0700 Subject: Problem karlsuss2 SNF 2010-05-13 11:25:25: Still have alignment problem on pieces chuck Message-ID: alignment using the "alignment check" button directly below the "exposure" button. This brings the wafer into soft/hard contact (depending on the program chosen), and any shift can be seen and corrected for by pressing the "alignment check" button to release and re align to adjust for any shift. Repeat until you are satisfied with the alignment, then hit expose while wafers are aligned in contact with the mask. If you are using the "align cont/exp" button (above the arrow buttons) to check your alignment, and then hit expose, you may see a shift, but only after development. I advise trying to do the pieces and use the "alignment check" button to check alignment before exposure. Hope that helps. From jasonlin at snf.stanford.edu Sun Nov 7 15:51:23 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 7 Nov 2010 15:51:23 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-07 15:51:22: Dangerous condition detected Message-ID: After an exposure, a message about a dangerous condition detected flashed on the screen, it then dropped my mask, and attempted to reset itself. Right now there's a message on the screen saying push Load to reset, but after pressing Load it would say reset failed. No other buttons work. From vilanova at snf.stanford.edu Mon Nov 8 08:11:45 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 08:11:45 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-07 15:51:22: Dangerous condition detected Message-ID: Y Micrometer was moved Out of the socket , Re installed and Initialized System, Ok to use. From ludwig at snf.stanford.edu Mon Nov 8 13:01:27 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:01:27 -0800 Subject: Problem karlsuss2 SNF 2010-11-08 13:01:27: Stopped working, vaccum ???!!! Message-ID: Load mask and wafer but lost vaccum From mkerby at snf.stanford.edu Mon Nov 8 13:25:21 2010 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:25:21 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-08 13:25:18: Z-axis hardware failure Message-ID: Machine asks for the load button. Starts a reset routine. Does not reset. cannot operate. From vilanova at snf.stanford.edu Mon Nov 8 13:51:47 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:51:47 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-08 13:25:18: Z-axis hardware failure Message-ID: Z axis MIcrometer Initialized , system started with no problem, no vacuum mask problem. From mkerby at snf.stanford.edu Mon Nov 8 14:21:05 2010 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Mon, 8 Nov 2010 14:21:05 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-08 14:21:01: WEC failure Message-ID: Mario workied on it for a while but the problem is not a quick fix. From gsosa at snf.stanford.edu Mon Nov 8 15:54:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 15:54:25 -0800 Subject: Comment karlsuss2 SNF 2010-11-08 15:54:24: Wec Problem Message-ID: Intermittent wec problem. Needs further troubleshooting. Will continue tomorrow. From gsosa at snf.stanford.edu Tue Nov 9 12:12:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 9 Nov 2010 12:12:31 -0800 Subject: Comment karlsuss2 SNF 2010-11-08 15:54:24: Wec Problem Message-ID: Intermittent with WEC head not resetting correctly. WEC not making sensor S 1.9( Z axis at bottom sensor). Checked all cables and connectors. Checked for obstructions in WEC travel. Made a 1/4 turn CCW adjustment to sensor S 1.9. Tested reset function many times with no failure. Tested basic machine operation with dummy mask and wafer-OK. Checked and calibrated exposure to 15.0 Mw/cm2. From gsosa at snf.stanford.edu Tue Nov 9 12:12:40 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 9 Nov 2010 12:12:40 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-08 14:21:01: WEC failure Message-ID: Intermittent with WEC head not resetting correctly. WEC not making sensor S 1.9( Z axis at bottom sensor). Checked all cables and connectors. Checked for obstructions in WEC travel. Made a 1/4 turn CCW adjustment to sensor S 1.9. Tested reset function many times with no failure. Tested basic machine operation with dummy mask and wafer-OK. Checked and calibrated exposure to 15.0 Mw/cm2. From gsosa at snf.stanford.edu Tue Nov 9 12:13:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 9 Nov 2010 12:13:03 -0800 Subject: Problem karlsuss2 SNF 2010-11-08 13:01:27: Stopped working, vaccum ???!!! Message-ID: Intermittent with WEC head not resetting correctly. WEC not making sensor S 1.9( Z axis at bottom sensor). Checked all cables and connectors. Checked for obstructions in WEC travel. Made a 1/4 turn CCW adjustment to sensor S 1.9. Tested reset function many times with no failure. Tested basic machine operation with dummy mask and wafer-OK. Checked and calibrated exposure to 15.0 Mw/cm2. From dkozak at snf.stanford.edu Wed Nov 10 00:14:11 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Wed, 10 Nov 2010 00:14:11 -0800 Subject: Comment karlsuss2 SNF 2010-11-10 00:14:10: Loss of wafer vacuum happens on every wafer Message-ID: message "loss of wafer vacuum" happens on every wafer after load. Ignoring it and continuing does not affect the operation -- wafer is securely held. When unloading, the wafer seems to be under good vacuum. From gsosa at snf.stanford.edu Wed Nov 10 09:03:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Nov 2010 09:03:41 -0800 Subject: Comment karlsuss2 SNF 2010-11-10 00:14:10: Loss of wafer vacuum happens on every wafer Message-ID: was not able to reproducr the problem. Tested with 3 different chucks. Cleaned the chuck top and bottom surfaces. Cleaned WEC mating surface. Cleaned the maskholder plate. From gsosa at snf.stanford.edu Wed Nov 10 09:05:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Nov 2010 09:05:07 -0800 Subject: Comment karlsuss2 SNF 2010-11-10 09:05:06: Weekly lamp check Message-ID: Checked lamp intensity- OK Intensity: 14.9 MW/cm2 Uniformity: 2.3% From gsosa at snf.stanford.edu Thu Nov 11 12:58:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Nov 2010 12:58:03 -0800 Subject: Problem karlsuss2 SNF 2010-11-10 20:37:22: Vacuum Message-ID: Tested system operation with test mask and wafer. Could not reproduce the problem. From gsosa at snf.stanford.edu Fri Nov 19 08:42:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Nov 2010 08:42:35 -0800 Subject: Comment karlsuss2 SNF 2010-11-19 08:42:35: Scheduled lamp change 11/19 Message-ID: Replacerd and set up lamp. Uniformity: 1.97 Ave: 15.14 From dkozak at snf.stanford.edu Sun Nov 28 10:42:32 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Sun, 28 Nov 2010 10:42:32 -0800 Subject: Problem karlsuss2 SNF 2010-11-28 10:42:31: right backside alignment camera not working Message-ID: Right backside alignment camera does not show any image -- played around with focus and light, left camera is OK, right does not work From gsosa at snf.stanford.edu Mon Nov 29 08:15:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 08:15:57 -0800 Subject: Problem karlsuss2 SNF 2010-11-28 10:42:31: right backside alignment camera not working Message-ID: Replaced lamp for "Right" BSA microscope. From faridz at snf.stanford.edu Tue Nov 30 13:16:47 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 30 Nov 2010 13:16:47 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-30 13:16:46: unable to run wafers VP stuck Message-ID: From vilanova at snf.stanford.edu Tue Nov 30 14:26:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Nov 2010 14:26:27 -0800 Subject: Shutdown karlsuss2 SNF 2010-11-30 13:16:46: unable to run wafers VP stuck Message-ID: user meant to report Coat # 2 . :-)