Shutdown karlsuss2 SNF 2010-11-08 14:21:01: WEC failure

gsosa at gsosa at
Tue Nov 9 12:12:40 PST 2010

Intermittent with WEC head not resetting correctly. WEC not making sensor S 1.9( Z axis at bottom sensor). Checked all cables and connectors. Checked for obstructions in WEC travel. Made a 1/4 turn CCW adjustment to sensor S 1.9. Tested reset function many times with no failure. Tested basic machine operation with dummy mask and wafer-OK. Checked and calibrated exposure to 15.0 Mw/cm2.

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