Comment karlsuss2 SNF 2010-11-10 00:14:10: Loss of wafer vacuum happens on every wafer

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Wed Nov 10 00:14:11 PST 2010


message "loss of wafer vacuum" happens on every wafer after load. 
 Ignoring it and continuing does not affect the operation -- wafer is securely held.  When unloading, the wafer seems to be under good vacuum.




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