Comment karlsuss2 SNF 2010-11-10 00:14:10: Loss of wafer vacuum happens on every wafer

gsosa at gsosa at
Wed Nov 10 09:03:41 PST 2010

was not able to reproducr the problem. Tested with 3 different chucks. Cleaned the chuck top and bottom surfaces. Cleaned WEC mating surface. Cleaned the maskholder plate.

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