Comment karlsuss2 SNF 2010-11-10 00:14:10: Loss of wafer vacuum happens on every wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Nov 10 09:03:41 PST 2010


was not able to reproducr the problem. Tested with 3 different chucks. Cleaned the chuck top and bottom surfaces. Cleaned WEC mating surface. Cleaned the maskholder plate.




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