From bchui at snf.stanford.edu Mon Sep 6 15:24:20 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 6 Sep 2010 15:24:20 -0700 Subject: Problem karlsuss2 SNF 2010-09-06 15:24:20: Litho Nanospec bulb burnt out Message-ID: Since there's no entry specifically for the nanospec, I'm flagging a nearby piece of equipment. From vilanova at snf.stanford.edu Tue Sep 7 07:45:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Sep 2010 07:45:21 -0700 Subject: Problem karlsuss2 SNF 2010-09-06 15:24:20: Litho Nanospec bulb burnt out Message-ID: Replaced Burnt Light bulb. From gsosa at snf.stanford.edu Mon Sep 13 08:30:38 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Sep 2010 08:30:38 -0700 Subject: Shutdown karlsuss2 SNF 2010-09-13 08:30:37: Scheduled lamp Change 9/13 Message-ID: Lamp change in progress From gsosa at snf.stanford.edu Mon Sep 13 09:18:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Sep 2010 09:18:42 -0700 Subject: Shutdown karlsuss2 SNF 2010-09-13 09:18:41: Power supply problem Message-ID: Need to repair lamp power supply. From gsosa at snf.stanford.edu Mon Sep 13 15:35:23 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:35:23 -0700 Subject: Comment karlsuss2 SNF 2010-09-13 15:35:22: Tool Status 9/13/10 Message-ID: System is still down for lamp power supply problem. New power supply is on order. ETA for power supply is 9/14/2010. From gsosa at snf.stanford.edu Wed Sep 15 16:14:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:14:33 -0700 Subject: Comment karlsuss2 SNF 2010-09-13 15:35:22: Tool Status 9/13/10 Message-ID: Replaced bad lamp power supply with new Suss CIC500 power supply.performed optical feedback loop cailbration for Constant Intensity mode. Had to physically adjust the position if the optical sensor in the lamp house due to over-saturation. adjusted cal pots for CI 1 and CI 2 for 60% of max readout. Calibrated intensity for both channels: CI 1( 365nm) setpoint 15.0 Mw/cm2, Uniformity 1.62% CI 2(405nm) setpoint 30.0 Mw/cm2, Uniformity 1.9% From gsosa at snf.stanford.edu Wed Sep 15 16:14:39 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:14:39 -0700 Subject: Shutdown karlsuss2 SNF 2010-09-13 09:18:41: Power supply problem Message-ID: Replaced bad lamp power supply with new Suss CIC500 power supply.performed optical feedback loop cailbration for Constant Intensity mode. Had to physically adjust the position if the optical sensor in the lamp house due to over-saturation. adjusted cal pots for CI 1 and CI 2 for 60% of max readout. Calibrated intensity for both channels: CI 1( 365nm) setpoint 15.0 Mw/cm2, Uniformity 1.62% CI 2(405nm) setpoint 30.0 Mw/cm2, Uniformity 1.9% From gsosa at snf.stanford.edu Wed Sep 15 16:14:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:14:46 -0700 Subject: Shutdown karlsuss2 SNF 2010-09-13 08:30:37: Scheduled lamp Change 9/13 Message-ID: Replaced bad lamp power supply with new Suss CIC500 power supply.performed optical feedback loop cailbration for Constant Intensity mode. Had to physically adjust the position if the optical sensor in the lamp house due to over-saturation. adjusted cal pots for CI 1 and CI 2 for 60% of max readout. Calibrated intensity for both channels: CI 1( 365nm) setpoint 15.0 Mw/cm2, Uniformity 1.62% CI 2(405nm) setpoint 30.0 Mw/cm2, Uniformity 1.9%