From mlpipes at snf.stanford.edu Tue Aug 2 16:58:34 2011 From: mlpipes at snf.stanford.edu (mlpipes at snf.stanford.edu) Date: Tue, 2 Aug 2011 16:58:34 -0700 Subject: Problem karlsuss2 SNF 2011-08-02 16:58:33: Overcurrent Message-ID: I loaded my mask, and exposed two wafers without issue. The third wafer I tried to load, the system said "system overcurrent - cannot continue" and the whole system restarted. The mask that was loaded at the time was released and dropped onto the wafer. From dton at snf.stanford.edu Tue Aug 2 21:23:41 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 2 Aug 2011 21:23:41 -0700 Subject: Comment karlsuss2 SNF 2011-08-02 21:23:41: No Overcurrent during my exposure Message-ID: machine behaved fine. From vilanova at snf.stanford.edu Wed Aug 3 07:44:14 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Aug 2011 07:44:14 -0700 Subject: Problem karlsuss2 SNF 2011-08-02 16:58:33: Overcurrent Message-ID: Cleaned up some thick resist residues from chuck System Checked and tested, NO overcurrent Issue, Ok to use. From kleedle at snf.stanford.edu Fri Aug 12 15:17:46 2011 From: kleedle at snf.stanford.edu (kleedle at snf.stanford.edu) Date: Fri, 12 Aug 2011 15:17:46 -0700 Subject: Problem karlsuss2 SNF 2011-08-12 15:17:45: Mechanical Reset Failure Message-ID: Hi, After exposing, the mask stuck to my piece and fell out of the mask holder when the piece dropped down. Neither the piece or the mask was damaged, however the machine is now in some kind error mode. It displays " Zaxis Reset Mechanics Failed" on the screen and asks for you to hit "Load" and then "Load" again to start, only to have reset mechanics fail again. Not sure how to reset the machine properly. My apologies. Ken Leedle coral id: kleedle From vilanova at snf.stanford.edu Mon Aug 15 08:05:54 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Aug 2011 08:05:54 -0700 Subject: Problem karlsuss2 SNF 2011-08-12 15:17:45: Mechanical Reset Failure Message-ID: Y MIcrometer Got MOved OUt ofd the socket, Re Installed MIcrometer And Tested, Ok ready to use. From cearhart at snf.stanford.edu Fri Aug 19 00:36:07 2011 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Fri, 19 Aug 2011 00:36:07 -0700 Subject: Problem karlsuss2 SNF 2011-08-19 00:36:06: automatic shutdown, won't restart Message-ID: In the middle of alignment got a "current overload" message, then the machine automatically shutdown. Display panel said "Watch out! Machine Restarting" then prompted to hit "Load." doing so resulted in the message "Reset Mechanics Failed, press Load button", but this results in the same message being displayed again. From vilanova at snf.stanford.edu Fri Aug 19 08:11:08 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 19 Aug 2011 08:11:08 -0700 Subject: Problem karlsuss2 SNF 2011-08-19 00:36:06: automatic shutdown, won't restart Message-ID: MIcrometer Got Moved Out of the socket again, Reinstalled and tested Ok to use, PLEASE DO NOT FORCE THE MICROMETER IF YOURE AT THE END OF THE MICROMETER LIMIT THE ALARM WILL GO OFF TO WARN YOU ABOUT IT, PLEASE DONT FORCE IT OUT. From cearhart at snf.stanford.edu Mon Aug 29 15:06:54 2011 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Mon, 29 Aug 2011 15:06:54 -0700 Subject: Problem karlsuss2 SNF 2011-08-29 15:06:54: left bsa objective light not working Message-ID: light source for left objective not responding to BSA/IR Left Illumination knob. Cannot use to find alignment mark. From gsosa at snf.stanford.edu Mon Aug 29 15:57:28 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Aug 2011 15:57:28 -0700 Subject: Problem karlsuss2 SNF 2011-08-29 15:06:54: left bsa objective light not working Message-ID: Replaced left BSA microscope lamp. Tested out OK. From biyang at snf.stanford.edu Wed Aug 31 12:40:23 2011 From: biyang at snf.stanford.edu (biyang at snf.stanford.edu) Date: Wed, 31 Aug 2011 12:40:23 -0700 Subject: Problem karlsuss2 SNF 2011-08-31 12:40:22: micorscope doens't come down after loading sample Message-ID: From gsosa at snf.stanford.edu Wed Aug 31 15:29:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Aug 2011 15:29:34 -0700 Subject: Problem karlsuss2 SNF 2011-08-31 12:40:22: micorscope doens't come down after loading sample Message-ID: Tested several times with mask and wafer. Unable to reproducle the problem.