Problem karlsuss2 SNF 2011-08-02 16:58:33: Overcurrent

mlpipes at snf.stanford.edu mlpipes at snf.stanford.edu
Tue Aug 2 16:58:34 PDT 2011


I loaded my mask, and exposed two wafers without issue. The third wafer I tried to load, the system said "system overcurrent - cannot continue" and the whole system restarted. The mask that was loaded at the time was released and dropped onto the wafer.




More information about the karlsuss2-pcs mailing list