Problem karlsuss2 SNF 2011-08-02 16:58:33: Overcurrent

mlpipes at mlpipes at
Tue Aug 2 16:58:34 PDT 2011

I loaded my mask, and exposed two wafers without issue. The third wafer I tried to load, the system said "system overcurrent - cannot continue" and the whole system restarted. The mask that was loaded at the time was released and dropped onto the wafer.

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