From gsosa at snf.stanford.edu Thu Dec 1 07:59:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Dec 2011 07:59:14 -0800 Subject: Problem karlsuss2 SNF 2011-11-23 10:20:17: Piece shifted during exposure in vacuum mode Message-ID: User doing work on ASML Stepper From vilanova at snf.stanford.edu Mon Dec 5 07:49:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Dec 2011 07:49:23 -0800 Subject: Comment karlsuss2 SNF 2011-11-30 19:39:41: microscope doesn't come down Message-ID: MIcroscope Moving Up/Down Ok, Y MIcrometer Found out of the socket Tightened and tested ok to use. From vilanova at snf.stanford.edu Mon Dec 5 07:49:29 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Dec 2011 07:49:29 -0800 Subject: Problem karlsuss2 SNF 2011-11-30 19:40:18: microscope doesn't come down Message-ID: MIcroscope Moving Up/Down Ok, Y MIcrometer Found out of the socket Tightened and tested ok to use. From gsosa at snf.stanford.edu Wed Dec 7 14:19:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:19:03 -0800 Subject: Comment karlsuss2 SNF 2011-12-07 14:19:02: Scheduled lamp change Message-ID: replaced and set up UV lamp. Calibrated exposure to 15.0 mw/cm2 From rhenn at snf.stanford.edu Thu Dec 8 18:38:16 2011 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Thu, 8 Dec 2011 18:38:16 -0800 Subject: Problem karlsuss2 SNF 2011-12-08 18:38:16: Misalignment ~10 um Message-ID: I am processing chips with spray coated film. This process worked yesterdy using karlsuss1. The developed region is ~10-15 um away from the wafer flat then where it should be. Before exposing the wafer, I brought the chip into contact and checked the alignment and it looked fine.I left it in contact and press the expose button. Somehow the chip shifted between alignment and exposure. From calarrudo at snf.stanford.edu Fri Dec 9 20:46:42 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 9 Dec 2011 20:46:42 -0800 Subject: Problem karlsuss2 SNF 2011-12-09 20:46:41: system needs rebooting Message-ID: From gsosa at snf.stanford.edu Sun Dec 11 12:42:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 11 Dec 2011 12:42:12 -0800 Subject: Problem karlsuss2 SNF 2011-12-09 20:46:41: system needs rebooting Message-ID: OK now From vilanova at snf.stanford.edu Wed Dec 14 09:43:40 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Dec 2011 09:43:40 -0800 Subject: Shutdown karlsuss2 SNF 2011-12-14 09:43:39: shutdown Message-ID: