Problem karlsuss2 SNF 2011-12-08 18:38:16: Misalignment ~10 um

rhenn at rhenn at
Thu Dec 8 18:38:16 PST 2011

I am processing chips with spray coated film. This process worked yesterdy using karlsuss1. The developed region is ~10-15 um away from the wafer flat then where it should be.  Before exposing the wafer, I brought the chip into contact and checked the alignment and it looked fine.I left it in contact and press the expose button. Somehow the chip shifted between alignment and exposure.

More information about the karlsuss2-pcs mailing list