From vilanova at snf.stanford.edu Tue Feb 1 08:06:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Feb 2011 08:06:06 -0800 Subject: Comment karlsuss2 SNF 2011-02-01 08:06:05: Micrometer out o fsocket Message-ID: In the Daily rounds Inspections I noticed that the X Micrometer was out of the socket, Please Do not Force it out The System Alarm Will sound when the micrometer Reached the End of the Lmit. From lindaw at snf.stanford.edu Tue Feb 1 10:47:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 1 Feb 2011 10:47:39 -0800 Subject: Comment karlsuss2 SNF 2011-02-01 10:47:38: why is it 64 degrees F in the litho room? Message-ID: From vilanova at snf.stanford.edu Tue Feb 1 13:20:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Feb 2011 13:20:59 -0800 Subject: Comment karlsuss2 SNF 2011-02-01 10:47:38: why is it 64 degrees F in the litho room? Message-ID: transfer Airflow ,temp humidity Problem, due to transfer Fan MOtor Broken. From vilanova at snf.stanford.edu Wed Feb 9 11:30:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Feb 2011 11:30:19 -0800 Subject: Shutdown karlsuss2 SNF 2011-02-09 11:30:18: micrometer socket out of position Message-ID: Micrometer socket out of position + micromter screw broken . From vilanova at snf.stanford.edu Wed Feb 9 15:29:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Feb 2011 15:29:26 -0800 Subject: Comment karlsuss2 SNF 2011-02-09 15:29:25: comtinue troubleshooting tomorrow.... Message-ID: From gsosa at snf.stanford.edu Thu Feb 10 12:13:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Feb 2011 12:13:20 -0800 Subject: Shutdown karlsuss2 SNF 2011-02-09 11:30:18: micrometer socket out of position Message-ID: Y micrometer functioning normally but slightly off center. Need to order parts to repair damaged mounting collar. The mask top plate error was caused during attempted repair of 1st problem. Troubleshot and found a hall-effect sensor had slid out of position and would not sense the top plate. re-adjusted sensor position to correct the problem. Did a functional test of system- All OK. From gsosa at snf.stanford.edu Thu Feb 10 12:13:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Feb 2011 12:13:30 -0800 Subject: Comment karlsuss2 SNF 2011-02-01 08:06:05: Micrometer out o fsocket Message-ID: Y micrometer functioning normally but slightly off center. Need to order parts to repair damaged mounting collar. The mask top plate error was caused during attempted repair of 1st problem. Troubleshot and found a hall-effect sensor had slid out of position and would not sense the top plate. re-adjusted sensor position to correct the problem. Did a functional test of system- All OK. From gsosa at snf.stanford.edu Thu Feb 10 12:13:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Feb 2011 12:13:34 -0800 Subject: Comment karlsuss2 SNF 2011-02-09 15:29:25: comtinue troubleshooting tomorrow.... Message-ID: Y micrometer functioning normally but slightly off center. Need to order parts to repair damaged mounting collar. The mask top plate error was caused during attempted repair of 1st problem. Troubleshot and found a hall-effect sensor had slid out of position and would not sense the top plate. re-adjusted sensor position to correct the problem. Did a functional test of system- All OK. From vilanova at snf.stanford.edu Mon Feb 14 08:50:10 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Feb 2011 08:50:10 -0800 Subject: Comment karlsuss2 SNF 2011-02-14 08:50:09: Broken Y Micrometer Screw has been replaced. Message-ID: Broken Y MIcrometer Screw has been replaced, Y MIcrometer back to normal. From tzhu at snf.stanford.edu Fri Feb 25 17:07:30 2011 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Fri, 25 Feb 2011 17:07:30 -0800 Subject: Problem karlsuss2 SNF 2011-02-25 17:07:30: x and y axis can not move freely. Message-ID: From tzhu at snf.stanford.edu Fri Feb 25 17:08:02 2011 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Fri, 25 Feb 2011 17:08:02 -0800 Subject: Shutdown karlsuss2 SNF 2011-02-25 17:08:01: x. and y axis not moveing well Message-ID: From vilanova at snf.stanford.edu Mon Feb 28 08:32:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Feb 2011 08:32:57 -0800 Subject: Shutdown karlsuss2 SNF 2011-02-25 17:08:01: x. and y axis not moveing well Message-ID: Checked X And Y MIcrometers, Tested With mask and wafer, Micrometers Working Fine , I think The problem was that the User was trying to MOve it while in contact. Ok to Use From vilanova at snf.stanford.edu Mon Feb 28 08:33:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Feb 2011 08:33:02 -0800 Subject: Problem karlsuss2 SNF 2011-02-25 17:07:30: x and y axis can not move freely. Message-ID: Checked X And Y MIcrometers, Tested With mask and wafer, Micrometers Working Fine , I think The problem was that the User was trying to MOve it while in contact. Ok to Use