From gsosa at snf.stanford.edu Mon Jan 3 08:58:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Jan 2011 08:58:02 -0800 Subject: Shutdown karlsuss2 SNF 2011-01-03 08:58:01: PM in progress Message-ID: 6 month PM in progress From gsosa at snf.stanford.edu Tue Jan 4 08:00:31 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 08:00:31 -0800 Subject: Shutdown karlsuss2 SNF 2011-01-03 08:58:01: PM in progress Message-ID: PM performed by vendor 0n 1/3/11. PM 98% complete. Qualifications in process. Tool is operational. Vendor will return on Wednesday 1/5 to vefify BSA microscope alignmnet. From gsosa at snf.stanford.edu Tue Jan 4 08:01:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 08:01:21 -0800 Subject: Problem karlsuss2 SNF 2011-01-04 08:01:20: Tool Status 1/4 Message-ID: PM performed by vendor 0n 1/3/11. PM 98% complete. Qualifications in process. Tool is operational. Vendor will return on Wednesday 1/5 to vefify BSA microscope alignmnet. From mahnaz at snf.stanford.edu Tue Jan 4 10:47:46 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 4 Jan 2011 10:47:46 -0800 Subject: Problem karlsuss2 SNF 2011-01-04 10:47:46: system up Message-ID: Ran 1 um 3612 expo. .9. Ran 1.6 um 3612 expo. 1.7 seconds for dark field mask and 1.5 s for light field mask. I noticed that the center of the wafer does not look good as the sides. Needs a little WEC adjustment in the center which I will ask the FSE to do that first thing in the morning 1/5/11. From mahnaz at snf.stanford.edu Wed Jan 5 11:47:16 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Jan 2011 11:47:16 -0800 Subject: Comment karlsuss2 SNF 2011-01-05 11:47:16: system up Message-ID: FSE did some more adjustment on the WEC pressure I ran more than 10 wafers and the result is good. slight issue on the top1.5/2 um resolved vs rest of the wafer 1/1.5 um were resolved very good. From mahnaz at snf.stanford.edu Wed Jan 5 11:50:06 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Jan 2011 11:50:06 -0800 Subject: Problem karlsuss2 SNF 2011-01-04 10:47:46: system up Message-ID: fse did some adjustment and I ran many wafers to confirm. From mahnaz at snf.stanford.edu Wed Jan 5 11:50:46 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Jan 2011 11:50:46 -0800 Subject: Problem karlsuss2 SNF 2011-01-04 08:01:20: Tool Status 1/4 Message-ID: FSE will be back today to do the BSA check. From mahnaz at snf.stanford.edu Wed Jan 5 14:22:09 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:22:09 -0800 Subject: Comment karlsuss2 SNF 2011-01-05 14:22:08: BSA up Message-ID: Fse and I checked the system and Grab image and focus right on the spot. From lindaw at snf.stanford.edu Wed Jan 19 12:21:56 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:21:56 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:21:55: lamp power supply beeping 14.7mJ/cm2 Message-ID: From lindaw at snf.stanford.edu Wed Jan 19 12:24:04 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:24:04 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:24:04: lamp power supply now 14.4 Message-ID: From lindaw at snf.stanford.edu Wed Jan 19 12:27:56 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:27:56 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:27:55: lamp power supply 14.3 mJ/cm2 Message-ID: lamp power supply ready drops during 8 sec exposure from 14.9 to 14.3. Also beeps. exposure not reliable. From gsosa at snf.stanford.edu Wed Jan 19 14:57:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 14:57:09 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:21:55: lamp power supply beeping 14.7mJ/cm2 Message-ID: Checked and calibrated lamp power supply. Intensity set to 15.0 Mw/cm2. Uniformity 2.0% From gsosa at snf.stanford.edu Wed Jan 19 14:57:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 14:57:16 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:24:04: lamp power supply now 14.4 Message-ID: Checked and calibrated lamp power supply. Intensity set to 15.0 Mw/cm2. Uniformity 2.0% From gsosa at snf.stanford.edu Wed Jan 19 14:57:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 14:57:22 -0800 Subject: Problem karlsuss2 SNF 2011-01-19 12:27:55: lamp power supply 14.3 mJ/cm2 Message-ID: Checked and calibrated lamp power supply. Intensity set to 15.0 Mw/cm2. Uniformity 2.0%