From gsosa at snf.stanford.edu Fri Jul 1 11:41:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Jul 2011 11:41:02 -0700 Subject: Problem karlsuss2 SNF 2011-06-30 12:49:24: lamp intensity highly variable Message-ID: Verified that the intensity was unstable with external meter. Tried calibrating the optical sensor feedback loop as per service manual. Still same problem with unstable light intensity. Opened up lamp house and checked shutter operation. Fould that the exposure shutter acting a bit lazy and sluggish, sometimes opening up about 98%. This was enough to cause feedback problems and target intensity issues. Adjusted pneumatic speed controller(TO 9.1) for positive opening of shutter. Restarted and stabilized the UV lamp. Checked and calibrated intensity to 15.0 Mw/cm2, Uniformity @ 1.33%. Cycled shutter many times with lamp test. The exposure is very repeatable. Will continue to monitor. WIll also order new air cylinders for the exposure shutter, since they have not been replaced in quite a while. From gsosa at snf.stanford.edu Fri Jul 1 11:41:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Jul 2011 11:41:22 -0700 Subject: Comment karlsuss2 SNF 2011-06-30 13:24:31: lamp intensity drop off during multiple exposure Message-ID: Verified that the intensity was unstable with external meter. Tried calibrating the optical sensor feedback loop as per service manual. Still same problem with unstable light intensity. Opened up lamp house and checked shutter operation. Fould that the exposure shutter acting a bit lazy and sluggish, sometimes opening up about 98%. This was enough to cause feedback problems and target intensity issues. Adjusted pneumatic speed controller(TO 9.1) for positive opening of shutter. Restarted and stabilized the UV lamp. Checked and calibrated intensity to 15.0 Mw/cm2, Uniformity @ 1.33%. Cycled shutter many times with lamp test. The exposure is very repeatable. Will continue to monitor. WIll also order new air cylinders for the exposure shutter, since they have not been replaced in quite a while. From gsosa at snf.stanford.edu Fri Jul 1 11:41:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Jul 2011 11:41:29 -0700 Subject: Comment karlsuss2 SNF 2011-06-30 14:49:44: Intensity Sensor Error Message-ID: Verified that the intensity was unstable with external meter. Tried calibrating the optical sensor feedback loop as per service manual. Still same problem with unstable light intensity. Opened up lamp house and checked shutter operation. Fould that the exposure shutter acting a bit lazy and sluggish, sometimes opening up about 98%. This was enough to cause feedback problems and target intensity issues. Adjusted pneumatic speed controller(TO 9.1) for positive opening of shutter. Restarted and stabilized the UV lamp. Checked and calibrated intensity to 15.0 Mw/cm2, Uniformity @ 1.33%. Cycled shutter many times with lamp test. The exposure is very repeatable. Will continue to monitor. WIll also order new air cylinders for the exposure shutter, since they have not been replaced in quite a while. From gsosa at snf.stanford.edu Fri Jul 1 11:41:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Jul 2011 11:41:46 -0700 Subject: Comment karlsuss2 SNF 2011-07-01 11:41:46: System status 7/1 Message-ID: Verified that the intensity was unstable with external meter. Tried calibrating the optical sensor feedback loop as per service manual. Still same problem with unstable light intensity. Opened up lamp house and checked shutter operation. Fould that the exposure shutter acting a bit lazy and sluggish, sometimes opening up about 98%. This was enough to cause feedback problems and target intensity issues. Adjusted pneumatic speed controller(TO 9.1) for positive opening of shutter. Restarted and stabilized the UV lamp. Checked and calibrated intensity to 15.0 Mw/cm2, Uniformity @ 1.33%. Cycled shutter many times with lamp test. The exposure is very repeatable. Will continue to monitor. WIll also order new air cylinders for the exposure shutter, since they have not been replaced in quite a while. From lindaw at snf.stanford.edu Wed Jul 13 15:46:44 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 13 Jul 2011 15:46:44 -0700 Subject: Problem karlsuss2 SNF 2011-07-13 15:46:43: lamp intensity 5.5, no beeping Message-ID: THe lamp intensity is reading 5.5 and stable, and the power supply is not beeping during exposure. From gsosa at snf.stanford.edu Wed Jul 13 16:48:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 Jul 2011 16:48:21 -0700 Subject: Problem karlsuss2 SNF 2011-07-13 15:46:43: lamp intensity 5.5, no beeping Message-ID: Checked and adjustd lamp position and calibrated lamp power supply to 15.0 mw/cm2 From srikantv at snf.stanford.edu Wed Jul 20 22:39:54 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 20 Jul 2011 22:39:54 -0700 Subject: Shutdown karlsuss2 SNF 2011-07-20 22:39:52: overcurrent error twice Message-ID: After enabling the tool and loading my first wafer it says there is a loss of vacuum and overccurent error. Subsequently the mask vacuum is released, dropping mask. On restart (press 'Load' for restart), the same sequence repeats. From vilanova at snf.stanford.edu Thu Jul 21 08:24:45 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2011 08:24:45 -0700 Subject: Shutdown karlsuss2 SNF 2011-07-20 22:39:52: overcurrent error twice Message-ID: the Y MIcrometer was Pulled + moved out of the socket therefore the system wasnt working properly, Also The top MIcroscopes were moved way out of position , this usally happens while trying to Align Pieces , Found Some of the Screws that holds the maskplate in place lose, readjusted all of them , Re initialized system , Exposed wafers , System Ok to use. From dton at snf.stanford.edu Sun Jul 24 13:24:58 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sun, 24 Jul 2011 13:24:58 -0700 Subject: Problem karlsuss2 SNF 2011-07-24 13:24:58: Someone really messed up the X-micrometer Message-ID: The micrometer was tightened really hard all the way to zero. It doesn't seem to move the stage anymore!!! Can't believe this. Dinh From vilanova at snf.stanford.edu Mon Jul 25 07:42:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jul 2011 07:42:31 -0700 Subject: Problem karlsuss2 SNF 2011-07-24 13:24:58: Someone really messed up the X-micrometer Message-ID: X Micrometer was pulled out of range, FOund the MIcrometer screw holder Inside the Wec area, Reinstalled it, tested, ok to use. From gsosa at snf.stanford.edu Mon Jul 25 07:51:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Jul 2011 07:51:16 -0700 Subject: Shutdown karlsuss2 SNF 2011-07-25 07:51:16: Scheduled downtime Message-ID: Replacing the air cylinders that actuate the exposure shutters. From gsosa at snf.stanford.edu Mon Jul 25 11:55:33 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Jul 2011 11:55:33 -0700 Subject: Shutdown karlsuss2 SNF 2011-07-25 07:51:16: Scheduled downtime Message-ID: Replaced air cylinders in exposure shutter assembly. Repaired air leak. Repaired lamp house lock down asembly. Replaced the UV lamp. Adjusted lamp position for maximum intensity. Calibrated lamp power supply for 15.0 Mw/cms. Intensity average: 15.16Mw/cm2 Uniformity:2.3% From dwnam at snf.stanford.edu Mon Jul 25 13:34:55 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Mon, 25 Jul 2011 13:34:55 -0700 Subject: Problem karlsuss2 SNF 2011-07-25 13:34:54: Automatically shut down and restarted Message-ID: Suddenly the power went out and mask vacuum was out as well. And restarted machine setting. It is not usable now. From vilanova at snf.stanford.edu Mon Jul 25 14:17:23 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jul 2011 14:17:23 -0700 Subject: Problem karlsuss2 SNF 2011-07-25 13:34:54: Automatically shut down and restarted Message-ID: Checked System , Could not repeat the User Problem, Sometimes This happens when Some of the buttons are pushed to many times or if the micrometers aew moved all the way out, tested machine everything ok, Good to use.