Shutdown karlsuss2 SNF 2011-07-20 22:39:52: overcurrent error twice

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Wed Jul 20 22:39:54 PDT 2011


After enabling the tool and loading my first wafer it says there is a loss of vacuum and overccurent error.
Subsequently the mask vacuum is released, dropping mask.
On restart (press 'Load' for restart), the same sequence repeats.




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