From jasonlin at snf.stanford.edu Sat Jun 4 17:33:58 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 4 Jun 2011 17:33:58 -0700 Subject: Problem karlsuss2 SNF 2011-06-04 17:33:58: Mask Vacuum Message-ID: Mask vacuum lost after pressing Alignment Check for no apparent reason. There seems to be a hissing sound, may drop mask again. From vilanova at snf.stanford.edu Mon Jun 6 08:24:49 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Jun 2011 08:24:49 -0700 Subject: Problem karlsuss2 SNF 2011-06-04 17:33:58: Mask Vacuum Message-ID: Cleaned mask Holder and Chuck, Tested aligned and exposed wafer, mask vacuum and wafer vacuum working Fine Ok to use, From jparker at snf.stanford.edu Fri Jun 10 17:09:47 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 10 Jun 2011 17:09:47 -0700 Subject: Comment karlsuss2 SNF 2011-06-10 17:09:46: x-knob dirty Message-ID: Someone with a clear-, resist-looking substance on their fingers got large fingerprints on the x-knob. Located where the red numbers are ~150. IPA does not clean it off. From srikantv at snf.stanford.edu Mon Jun 13 02:13:02 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 13 Jun 2011 02:13:02 -0700 Subject: Problem karlsuss2 SNF 2011-06-13 02:13:01: Left camera light broken for backside alignment Message-ID: Light not working on left side camera From vilanova at snf.stanford.edu Mon Jun 13 08:18:09 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Jun 2011 08:18:09 -0700 Subject: Problem karlsuss2 SNF 2011-06-13 02:13:01: Left camera light broken for backside alignment Message-ID: Replacced Broken BSA Lightbulb. From lindaw at snf.stanford.edu Thu Jun 23 10:00:49 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 23 Jun 2011 10:00:49 -0700 Subject: Problem karlsuss2 SNF 2011-06-23 10:00:48: lamp power supply alarming during exposure Message-ID: during a multiple exposure, 8 sec x 8 cycles, the lamp power supply started alarming about three cycles in, and from then I watched as the intensity went from 14.5 to 14.3 over the next 5 cycles. From vilanova at snf.stanford.edu Thu Jun 23 11:37:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 11:37:38 -0700 Subject: Comment karlsuss2 SNF 2011-06-23 11:37:38: Monthly Lamp and calibration Completed Message-ID: Monthly Lamp Calibration Completed : Average Intensity = 15Mw/Cm2 Uniformity = 2.5% From vilanova at snf.stanford.edu Thu Jun 23 11:38:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 11:38:19 -0700 Subject: Problem karlsuss2 SNF 2011-06-23 10:00:48: lamp power supply alarming during exposure Message-ID: Monthly Lamp Calibration Completed : Average Intensity = 15Mw/Cm2 Uniformity = 2.5% Tested and Calibrated . No more Beeping Sound WHile Exposing From gsosa at snf.stanford.edu Tue Jun 28 11:03:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Jun 2011 11:03:35 -0700 Subject: Shutdown karlsuss2 SNF 2011-06-28 11:03:35: 6 month PM Message-ID: Scheduled downtime. 6 month PM. From mahnaz at snf.stanford.edu Tue Jun 28 16:35:28 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 28 Jun 2011 16:35:28 -0700 Subject: Shutdown karlsuss2 SNF 2011-06-28 11:03:35: 6 month PM Message-ID: The wec was rebuild but the resolution was not satisfactory. I ran more than 15 wafers and slowely adjusted the wec. The last test i could only resolve 2 um in the center. 1.5 um resolved in other areas with 3612 1 um with 1.2 seconds of exposure. We have adjusted too many things and need to let the system stablize. tomorrow will run more tests. From mahnaz at snf.stanford.edu Tue Jun 28 16:35:58 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 28 Jun 2011 16:35:58 -0700 Subject: Comment karlsuss2 SNF 2011-06-28 16:35:57: pm top to BSAhas been tested. Message-ID: From lindaw at snf.stanford.edu Thu Jun 30 12:49:25 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 30 Jun 2011 12:49:25 -0700 Subject: Problem karlsuss2 SNF 2011-06-30 12:49:24: lamp intensity highly variable Message-ID: During a multiple exposure (8.0 sec X9 cycles, 10 sec wait) the lamp power supply started beeping during the last 3 cycles. When I went and looked at the intensity, it was only 14.2, then the next cycle was 12.7, and the last cycle was 12.2 mW/cm2. When I ran the the lamp test, the intensity was only 4.6. After waiting 10 sec, I ran the lamp test again, and it was 14.9 and stable for about 15 seconds. I waited another 15 seconds and ran the lamp test again, and it was 7.8. Waited 15 seconds, and ran again and it was 13.2 and beeping. After writing up this message, I repeated the test, and 4 cycles were reading 14.9 and stable. I will try another wafer exposure. From lindaw at snf.stanford.edu Thu Jun 30 13:24:31 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 30 Jun 2011 13:24:31 -0700 Subject: Comment karlsuss2 SNF 2011-06-30 13:24:31: lamp intensity drop off during multiple exposure Message-ID: OK, I increased the wait time to 15, then 20 seconds for a 8.0 sec, 9 cycle multiple exposure. The intensity spikes at 20 during the 1st cycle, then after about 4 seconds drops down to 14.9. The next few cycles the intensity starts lower, and then works its way up to 14.9, a little more slowly with each cycle. By the 5th or 6th cycle, the baseline intensity starts to drop off and the lamp power supply starts beeping. The only significant difference between the 15 sec wait and the 20 sec wait was that the drop off on the last 4 cycles wasn't as bad for the 20 sec wait, but the intensity still drops off. From vilanova at snf.stanford.edu Thu Jun 30 14:49:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:49:44 -0700 Subject: Comment karlsuss2 SNF 2011-06-30 14:49:44: Intensity Sensor Error Message-ID: Recalibrated the lamp , the Intensity was Going from 15Mw/Cm2 to 9.0Mw/cm2 , After calibration I got it to go back to 15Mw/Cm2 and theres no alarms anymore ., However theres probably a defective Intensity Sensor , we are going to keep an eye on it to see if the error come back.