Shutdown karlsuss2 SNF 2011-06-28 11:03:35: 6 month PM

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Jun 28 16:35:28 PDT 2011


The wec was rebuild but the resolution was not satisfactory.
I ran more than 15 wafers and slowely adjusted the wec.
The last test  i could only resolve 2 um in the center. 1.5 um resolved in other areas  with 3612  1 um with 1.2 seconds of exposure.
We have adjusted too many things and need to let the system stablize.
tomorrow will run more tests.




More information about the karlsuss2-pcs mailing list