From npapte at snf.stanford.edu Tue May 3 21:20:23 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Tue, 3 May 2011 21:20:23 -0700 Subject: Problem karlsuss2 SNF 2011-05-03 21:20:22: BSA cannot focus on the wafer Message-ID: From vilanova at snf.stanford.edu Wed May 4 08:18:41 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 May 2011 08:18:41 -0700 Subject: Problem karlsuss2 SNF 2011-05-03 21:20:22: BSA cannot focus on the wafer Message-ID: checked BSA Illuminators , Both are working Fine, I put my mask and a wafers to Copy the User problem , But the BSA and Focus Knobs are working Fine, Could Not Repeat the user problem. Ok to use. From vilanova at snf.stanford.edu Fri May 13 09:28:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 May 2011 09:28:31 -0700 Subject: Comment karlsuss2 SNF 2011-05-13 09:28:30: Monthly Lamp Changed Completed Message-ID: Monthly Lamp Changed Completed Uniformity = 1% Average Intensity = 15.0mw/Cm2 From srikantv at snf.stanford.edu Mon May 16 03:00:47 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 16 May 2011 03:00:47 -0700 Subject: Problem karlsuss2 SNF 2011-05-16 03:00:47: camera focus flickers during backside align Message-ID: During Back to Front alignment, the camera focus flickers and is not stable From vilanova at snf.stanford.edu Mon May 16 10:07:24 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 May 2011 10:07:24 -0700 Subject: Problem karlsuss2 SNF 2011-05-16 03:00:47: camera focus flickers during backside align Message-ID: We have checked the Top and Bottom Cameras and Exposed and Aligned wafers , we couldnt duplicate the flickering problem, what we found was that One of the chuclks was dirty therefore we couldnt get good vacuum , Cleaned the chuck and try again , Focus Working fine and there was no vacuum Issue problem anymore, We'll keep an eye to see if the problem comes back. From srikantv at snf.stanford.edu Tue May 17 02:22:08 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 17 May 2011 02:22:08 -0700 Subject: Shutdown karlsuss2 SNF 2011-05-17 02:22:07: Machine reset Message-ID: I received an "overcurrent" error and the machine reset. Unable to reboot back up. From vilanova at snf.stanford.edu Tue May 17 08:01:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 May 2011 08:01:59 -0700 Subject: Shutdown karlsuss2 SNF 2011-05-17 02:22:07: Machine reset Message-ID: Z Axiss Was moved way out of limits therefore It Couldnt make the sensor when moved back home, Re- Initialized System And tested + Exposed wafers, System back to normal , Good to use. From jparker at snf.stanford.edu Mon May 23 12:16:08 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Mon, 23 May 2011 12:16:08 -0700 Subject: Shutdown karlsuss2 SNF 2011-05-23 12:16:07: System reset upon unload Message-ID: Saw an error flash by just after I exposed and as I tried to unload. The error was something about an "end limit". The system currently says "hit load to restart" but this times out. I suspect the system just needs a hard reset, but I want to let maintenance take a look rather than me possibly breaking something. From gsosa at snf.stanford.edu Mon May 23 13:02:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 May 2011 13:02:34 -0700 Subject: Shutdown karlsuss2 SNF 2011-05-23 12:16:07: System reset upon unload Message-ID: System had a Z axix timeout error. Wec could not reset to lower position. Made slight adjustment to Z position home flag. Reset system several times. All looks OK. Tested system out with dummy mask and wafer- OK. From vilanova at snf.stanford.edu Wed May 25 09:25:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 May 2011 09:25:31 -0700 Subject: Comment karlsuss2 SNF 2011-05-25 09:25:29: lamp calibration results Message-ID: Lamp Calibration Results: Intensity 15Mw/Cm2 Uniformity = 1.9% From zeyuan at snf.stanford.edu Mon May 30 20:07:47 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Mon, 30 May 2011 20:07:47 -0700 Subject: Problem karlsuss2 SNF 2011-05-30 20:07:46: Lump won't work Message-ID: Keyboard frozen during mask change. Turned off, rebooted. Everything looked fine, except lump won't work anymore. From vilanova at snf.stanford.edu Tue May 31 08:29:27 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 May 2011 08:29:27 -0700 Subject: Problem karlsuss2 SNF 2011-05-30 20:07:46: Lump won't work Message-ID: User Shutdown the system From the main Controller, the Controllers For the lamp Setting Were Moved aswell, POwered Up System , power supply . Calibrated lamp and tested , Ok to use.