Problem karlsuss2 SNF 2011-05-03 21:20:22: BSA cannot focus on the wafer

vilanova at vilanova at
Wed May 4 08:18:41 PDT 2011

checked BSA Illuminators , Both are working Fine, I put my
mask and a wafers to Copy the User problem , But the
BSA and Focus Knobs are working Fine, Could Not 
Repeat the user problem. Ok to use. 

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