Problem karlsuss2 SNF 2011-05-16 03:00:47: camera focus flickers during backside align

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 16 10:07:24 PDT 2011


We have checked the Top and Bottom Cameras and Exposed and 
Aligned  wafers , we couldnt  duplicate the flickering problem,
what we found was that One of the chuclks was dirty therefore we 
couldnt  get good vacuum , Cleaned the chuck and try again , Focus
Working fine and there was no vacuum Issue problem anymore, We'll
keep an eye to see if the problem comes back. 




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