Problem karlsuss2 SNF 2011-05-16 03:00:47: camera focus flickers during backside align
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon May 16 10:07:24 PDT 2011
We have checked the Top and Bottom Cameras and Exposed and
Aligned wafers , we couldnt duplicate the flickering problem,
what we found was that One of the chuclks was dirty therefore we
couldnt get good vacuum , Cleaned the chuck and try again , Focus
Working fine and there was no vacuum Issue problem anymore, We'll
keep an eye to see if the problem comes back.
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