Shutdown karlsuss2 SNF 2011-05-23 12:16:07: System reset upon unload

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 23 13:02:34 PDT 2011


System had a Z axix timeout error. Wec could not reset to lower position. Made slight adjustment to Z position home flag. Reset system several times. All looks OK. Tested system out with dummy mask and wafer- OK.




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