From lindaw at snf.stanford.edu Fri Oct 7 10:43:07 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Oct 2011 10:43:07 -0700 Subject: Problem karlsuss2 SNF 2011-10-07 10:43:07: lamp output 14.0 mW/Cm2 power supply beeping Message-ID: The lamp output is only 14.0 mW and the power supply is beeping. help? From gsosa at snf.stanford.edu Fri Oct 7 11:33:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Oct 2011 11:33:25 -0700 Subject: Problem karlsuss2 SNF 2011-10-07 10:43:07: lamp output 14.0 mW/Cm2 power supply beeping Message-ID: Checked and calibrated lamp power supply for 15 mw/cm2. Uniformity : 2.3% From kgc at snf.stanford.edu Fri Oct 14 18:51:22 2011 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Fri, 14 Oct 2011 18:51:22 -0700 Subject: Problem karlsuss2 SNF 2011-10-14 18:51:22: Overcurrent Error (twice) Message-ID: I'm getting the same "overcurrent" error that seems to have been reported a lot in the past. Like everyone else, it drops my mask onto the wafer and has to restart. When it happened the first time, I thought it was a fluke and tried it again, but it happened again. Previously today I had gotten it to expose a few wafers, but for some reason after development the pattern seemed faint, patchy, and diffuse. Not sure if the problems are related. From vilanova at snf.stanford.edu Mon Oct 17 08:47:39 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Oct 2011 08:47:39 -0700 Subject: Problem karlsuss2 SNF 2011-10-14 18:51:22: Overcurrent Error (twice) Message-ID: Found The X MIcrometer Out of the socket again, this usually happens when people who has pieces travel or move the micrometer too far or out of the limit, I re installed it and tested , NO overcurrent During my wafers exposure, ok to use. From npapte at snf.stanford.edu Sun Oct 23 23:51:53 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 23 Oct 2011 23:51:53 -0700 Subject: Problem karlsuss2 SNF 2011-10-23 23:51:53: BSA left camera / illumination not working Message-ID: can't see anything from the BSA left camera From vilanova at snf.stanford.edu Mon Oct 24 07:36:03 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Oct 2011 07:36:03 -0700 Subject: Problem karlsuss2 SNF 2011-10-23 23:51:53: BSA left camera / illumination not working Message-ID: Replaced Burned Light Bulb, Tested Ok, To Use. From vilanova at snf.stanford.edu Thu Oct 27 11:21:30 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 11:21:30 -0700 Subject: Comment karlsuss2 SNF 2011-10-27 11:21:30: Power Supply Beeping .. ( We'll Do a lamp change this afternoon Message-ID: Lamp power supply Beeping, We'll Do a Monthly lamp change and calibrations this afternoon. From vilanova at snf.stanford.edu Thu Oct 27 14:03:15 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 14:03:15 -0700 Subject: Shutdown karlsuss2 SNF 2011-10-27 14:03:15: Lamp change In progress.... Message-ID: From vilanova at snf.stanford.edu Thu Oct 27 14:49:50 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 14:49:50 -0700 Subject: Shutdown karlsuss2 SNF 2011-10-27 14:03:15: Lamp change In progress.... Message-ID: Monthly Lamp changed And Calibration Completed. Lamp changed resutls : Average Intensity = 15.0Mw/Cm2 Uniformity = 1.26% From vilanova at snf.stanford.edu Thu Oct 27 14:50:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 14:50:06 -0700 Subject: Comment karlsuss2 SNF 2011-10-27 14:50:05: Monthly Lamp changed And Calibration Completed. Message-ID: Monthly Lamp changed And Calibration Completed. Lamp changed resutls : Average Intensity = 15.0Mw/Cm2 Uniformity = 1.26%