From gsosa at snf.stanford.edu Thu Sep 1 09:32:47 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 09:32:47 -0700 Subject: Comment karlsuss2 SNF 2011-09-01 09:32:46: Scheduled lamp change 9/1 Message-ID: Scheduled lamp change completed. Uniformity: 2.2% Ave. Intensity: 15.3 From lindaw at snf.stanford.edu Thu Sep 1 12:25:03 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 1 Sep 2011 12:25:03 -0700 Subject: Shutdown karlsuss2 SNF 2011-09-01 12:25:03: move timeout Message-ID: The chuck is stuck after exposure. Move timeout error message. says to press flashing lights to retry. Only flashing light is the undo button, and pressing does not remove Move Timeout error. Wafer stuck on chuck, which is stuck in system. From vilanova at snf.stanford.edu Thu Sep 1 13:21:15 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Sep 2011 13:21:15 -0700 Subject: Shutdown karlsuss2 SNF 2011-09-01 12:25:03: move timeout Message-ID: Top MIcroscope Got stuck ,. On Top position, Re initialized system MIcroscope MOved Up/ Down A few times, Ok to use. From cearhart at snf.stanford.edu Fri Sep 2 03:41:51 2011 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Fri, 2 Sep 2011 03:41:51 -0700 Subject: Problem karlsuss2 SNF 2011-09-02 03:41:51: overcurrent error Message-ID: same overcurrent error as before, machine won't restart. I did move either x, y, or rotation micrometer even remotely close to out of range. From vilanova at snf.stanford.edu Fri Sep 2 07:39:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Sep 2011 07:39:37 -0700 Subject: Problem karlsuss2 SNF 2011-09-02 03:41:51: overcurrent error Message-ID: Z Axis MOved All the way out of Limit That it could trigger the sensor, Re initialized system and tested ok,. Good to use. From lindaw at snf.stanford.edu Thu Sep 15 15:27:06 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 15 Sep 2011 15:27:06 -0700 Subject: Problem karlsuss2 SNF 2011-09-15 15:27:06: lamp power supply beeping. output 14.7mW/ Message-ID: From gsosa at snf.stanford.edu Thu Sep 15 16:17:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 15 Sep 2011 16:17:08 -0700 Subject: Problem karlsuss2 SNF 2011-09-15 15:27:06: lamp power supply beeping. output 14.7mW/ Message-ID: Checked and calibrated the exposure. Ave Intensity 15.28 , Uniformity: 1.9% From roopalik at snf.stanford.edu Thu Sep 22 16:27:49 2011 From: roopalik at snf.stanford.edu (roopalik at snf.stanford.edu) Date: Thu, 22 Sep 2011 16:27:49 -0700 Subject: Problem karlsuss2 SNF 2011-09-22 16:27:48: Released mask during wafer exposure with error msg of overpressure Message-ID: From roopalik at snf.stanford.edu Thu Sep 22 16:36:56 2011 From: roopalik at snf.stanford.edu (roopalik at snf.stanford.edu) Date: Thu, 22 Sep 2011 16:36:56 -0700 Subject: Shutdown karlsuss2 SNF 2011-09-22 16:36:56: Error State: Reset Mechanics failed Message-ID: From cbaxter at snf.stanford.edu Thu Sep 22 17:11:00 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 22 Sep 2011 17:11:00 -0700 Subject: Comment karlsuss2 SNF 2011-09-22 17:10:59: Z axis Message-ID: stage will initialize on z axis, still troubleshooting... From vilanova at snf.stanford.edu Fri Sep 23 08:48:59 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Sep 2011 08:48:59 -0700 Subject: Problem karlsuss2 SNF 2011-09-22 16:27:48: Released mask during wafer exposure with error msg of overpressure Message-ID: Adjusted Grab Z POsition and tested, Exposed wafers Ok to use. I also clean the Chuck I Found it dirty and sticky. From vilanova at snf.stanford.edu Fri Sep 23 08:49:05 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Sep 2011 08:49:05 -0700 Subject: Shutdown karlsuss2 SNF 2011-09-22 16:36:56: Error State: Reset Mechanics failed Message-ID: Adjusted Grab Z POsition and tested, Exposed wafers Ok to use. I also clean the Chuck I Found it dirty and sticky. From vilanova at snf.stanford.edu Fri Sep 23 08:49:11 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Sep 2011 08:49:11 -0700 Subject: Comment karlsuss2 SNF 2011-09-22 17:10:59: Z axis Message-ID: Adjusted Grab Z POsition and tested, Exposed wafers Ok to use. I also clean the Chuck I Found it dirty and sticky. From lindaw at snf.stanford.edu Fri Sep 23 10:50:12 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 23 Sep 2011 10:50:12 -0700 Subject: Problem karlsuss2 SNF 2011-09-23 10:50:12: lamp output 13.7, power supply beeping Message-ID: The output should be 15.0 mW/cm2. From gsosa at snf.stanford.edu Fri Sep 23 13:54:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Sep 2011 13:54:27 -0700 Subject: Problem karlsuss2 SNF 2011-09-23 10:50:12: lamp output 13.7, power supply beeping Message-ID: Adjusted lamp and calibrated power supply. Average: 15.24mW/cm2, Uniformity: 1.9% From gsosa at snf.stanford.edu Fri Sep 30 08:03:50 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:03:50 -0700 Subject: Comment karlsuss2 SNF 2011-09-30 08:03:50: Scheduled lamp change 9/30 Message-ID: Lamp change completed. Ave Intensity: 15.1 Mw/cm2 Uniformity: 1.65%