Shutdown karlsuss2 SNF 2011-09-01 12:25:03: move timeout

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Sep 1 12:25:03 PDT 2011


The chuck is stuck after exposure.  Move timeout error message.
says to press flashing lights to retry.   Only flashing light is the undo button, and pressing does not remove Move Timeout error. Wafer stuck on chuck, which is stuck in system.




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