Shutdown karlsuss2 SNF 2011-09-22 16:36:56: Error State: Reset Mechanics failed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 23 08:49:05 PDT 2011


Adjusted Grab Z POsition  and tested, Exposed wafers Ok to use.
I also clean the Chuck I Found it dirty and sticky. 




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