Shutdown karlsuss2 SNF 2012-04-24 10:51:42: Objective is too close to mask holder
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Tue Apr 24 10:51:42 PDT 2012
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Problem karlsuss2 SNF 2012-04-24 10:42:44: objective head too low, can't move it up.
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Shutdown karlsuss2 SNF 2012-04-24 10:51:42: Objective is too close to mask holder
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coars focus is stuck as well.
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Problem karlsuss2 SNF 2012-04-24 10:42:44: objective head too low, can't move it up.
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Shutdown karlsuss2 SNF 2012-04-24 10:51:42: Objective is too close to mask holder
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