From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-08-07 08:56:49: Lamp Change and
 Calibration Completed
Message-ID: <5068099.46.1344355009477.JavaMail.coral@shine>

Lamp Calibration Results:
Uniformity 1%
Average Intensity = 15Mw/Cm2


From chienyuc at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-07 19:36:37: Zaxis failed
Message-ID: <13966786.61.1344393397455.JavaMail.coral@shine>

Machine stuck in Zaxis moving timeout before loading.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-07 19:36:37: Zaxis failed
Message-ID: <8089545.63.1344437036773.JavaMail.coral@shine>

Initialized System , Z Axis Motor Back to normal, Tested With
mask and Exposed wafers, Ok to use. 


From jackson at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: jackson at snf.stanford.edu (jackson at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-08-11 17:49:56: backside alignment light
 is out on right side
Message-ID: <18170799.149.1344732597191.JavaMail.coral@shine>



From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-08-11 17:49:56: backside alignment
 light is out on right side
Message-ID: <22129174.8.1344868649224.JavaMail.coral@shine>

Replaced Dead BSA Light Bulb & tested , Ok To use. 


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-08-16 13:50:56: lamp power supply
 beeping during exp
Message-ID: <210017.104.1345150256745.JavaMail.coral@shine>

The lamp power supply is beeping during exp and the digital readout is 14.9


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-08-16 13:50:56: lamp power supply
 beeping during exp
Message-ID: <22742170.107.1345152871462.JavaMail.coral@shine>

Calibrated lamp , No more Beeping, 
Intensity = 15.0Mw/cm2


From mahnaz at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-08-17 16:03:31: restarted the system
Message-ID: <30464186.157.1345244612620.JavaMail.coral@shine>



From faridz at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-08-24 09:42:56: loss vacuum
Message-ID: <10787467.118.1345826576900.JavaMail.coral@shine>

unable to run wafers, vacuum loss error!


From mahnaz at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-24 10:38:28: WEC Vac. error
Message-ID: <503747.127.1345829909171.JavaMail.coral@shine>

Mario has been working on it since 9 am.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-24 10:38:28: WEC Vac. error
Message-ID: <15433351.130.1345830234010.JavaMail.coral@shine>

Wec was Giving a Vacuum Error Because someone MOved the DO
 NOT MOVE ADJUSTMENT Button, Adjusted Vacuum and tested, 
Exposed wafer, System back to normal. 


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-08-24 09:42:56: loss vacuum
Message-ID: <784963.131.1345830239058.JavaMail.coral@shine>

Wec was Giving a Vacuum Error Because someone MOved the DO
 NOT MOVE ADJUSTMENT Button, Adjusted Vacuum and tested, 
Exposed wafer, System back to normal. 


From hohmanjn at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: hohmanjn at snf.stanford.edu (hohmanjn at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-30 10:15:35: System unresponsive
Message-ID: <23842496.113.1346346935088.JavaMail.coral@shine>

System made a thunk sound on unload.  Does not respond to button presses, stuck on "press enter to confirm unload".  Additionally, None of the exposures attempted prior to system fail were acceptable, but its unclear whether this was due to user or instrumental failure.


From gsosa at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-08-30 10:15:35: System unresponsive
Message-ID: <25955435.137.1346361776953.JavaMail.coral@shine>

Could not reset the WEC. Giving a Z height mechanics failed. Checked and adjusted WEC bottom position sensor. Re-initialized all hardware. Tested system mechanical operation.All OK.


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-09-18 12:37:56: lamp power supply
 beeping 14.7mW/cm2
Message-ID: <13591483.23.1347997077182.JavaMail.coral@shine>

The lamp power supply is beeping during exposure, and the power is down to 14.7 mW/cm2, instead of 15.0.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-09-18 12:37:56: lamp power supply
 beeping 14.7mW/cm2
Message-ID: <20866081.24.1348000066604.JavaMail.coral@shine>

Recalibrated lamp , Beeping Is Gone,
!5Mw/Cm2 Top, Bottom Left, Right and Center. 


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-09-25 11:38:06: lamp power supply
 beeping 14.7 mW/cm2
Message-ID: <10643000.12.1348598288018.JavaMail.coral@shine>



From gsosa at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-09-25 11:38:06: lamp power supply
 beeping 14.7 mW/cm2
Message-ID: <28517295.15.1348609145795.JavaMail.coral@shine>

Replaced UV lamp. Calibrated exposure to 15 Mw/cm2. Uniformity: 1.9%


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-10-25 14:13:23: lamp power supply
 beeping during exposure
Message-ID: <14461415.101.1351199604394.JavaMail.coral@shine>

readout is 14.5 mW/cm2.  Should be 15.0.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-10-26 09:33:45: Monthly Lamp And
 Calibration Completed
Message-ID: <23778093.115.1351269225830.JavaMail.coral@shine>

Monthly Lamp And Calibration Completed 
Average Intensity = 15Mw/Cm2
Uniformity = 2.12%


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-10-25 14:13:23: lamp power supply
 beeping during exposure
Message-ID: <2559293.117.1351269332847.JavaMail.coral@shine>

Replaced lamp ANd Calibrated. 


From kangjuhy at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: kangjuhy at snf.stanford.edu (kangjuhy at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-10-31 19:59:37: Power densities of CH1
 and CH2 are 0
Message-ID: <16425340.135.1351738778579.JavaMail.coral@shine>



From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-10-31 19:59:37: Power densities of
 CH1 and CH2 are 0
Message-ID: <9968129.137.1351780658086.JavaMail.coral@shine>

I,m Not sure if the user had te tool enable or not, The Power supply 
Panel Shows 0 Unless Until You Expose A wafer, Tested Ok to use. 


From amoini at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: amoini at snf.stanford.edu (amoini at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-11-08 10:13:12: top screw missing on
 mask holder
Message-ID: <4533263.33.1352398393652.JavaMail.coral@shine>

One of the 3 screws we use to set the mask in the mask holder is missing. 


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-11-08 10:13:12: top screw missing on
 mask holder
Message-ID: <16472585.47.1352415562868.JavaMail.coral@shine>

Replaced the missing special Screw  Mask Holder. 


From gsosa at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-11-09 12:48:35: Badger Install 11/9
Message-ID: <30502958.18.1352494115747.JavaMail.coral@shine>

Installed and activated badger interlock box in place of Coral box. Interlock tested OK. The "ON" display was replaced with a 2 color LED. When the red light is on, the tool is disabled. When the green light is on, the tool is enabled.


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-20 09:44:41: mask chuck missing top
 alignment pin
Message-ID: <24492025.0.1353433481886.JavaMail.coral@shine>



From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-20 09:44:41: mask chuck missing
 top alignment pin
Message-ID: <15955724.2.1353439447803.JavaMail.coral@shine>

Replaced Missing Pin. 


From lagous at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lagous at snf.stanford.edu (lagous at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-23 19:23:53: chuck T coordinate  out
 of range
Message-ID: <12869346.16.1353727434478.JavaMail.coral@shine>

It sudenly gave an error of overcurrent and vacuum died, dropping the mask on the wafer. Got the wafer and mask safely out and the machine went in an initialization kind of mode asking to load again. then it gave an error onthe t coordinate of the chuck. It won't react to any button.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-23 19:23:53: chuck T coordinate
  out of range
Message-ID: <4999693.8.1353944828363.JavaMail.coral@shine>

Re Initialized the system and Inserted mask, Exposed a wafer, System
Working FIne, No Overcurrent Problem. Ok to use. 


From mahnaz at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-11-26 11:14:36: overcurrent
Message-ID: <28756233.31.1353957277669.JavaMail.coral@shine>

dropped the mask, Mario is working on it.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-11-26 11:14:36: overcurrent
Message-ID: <13137922.33.1353959694986.JavaMail.coral@shine>

Adjusted Z position, And tested , Ok to use. 


From lindaw at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-27 11:25:25: lamp power supply
 beeping during exposure
Message-ID: <14375743.5.1354044326098.JavaMail.coral@shine>



From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Problem karlsuss2 SNF 2012-11-27 11:25:25: lamp power supply
 beeping during exposure
Message-ID: <6037166.0.1354051929895.JavaMail.coral@shine>

I Recalibrated the lamp,  No more beeping Noise, ok
To use. 


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-11-28 08:51:56: Monthly lamp changed and
 calibrated
Message-ID: <15100647.38.1354121516330.JavaMail.coral@shine>

Monthly lamp change and calibration Completed
Uniformity = 1.2%
Intensity 15Mw/Cm2


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Comment karlsuss2 SNF 2012-12-07 06:48:27: X Micrometer Found Out
 of the socket
Message-ID: <3837800.17.1354891708177.JavaMail.coral@shine>

Someone Moved the X Micrometer way to Far and it wasnt reported it  ,  User HKTRAN Just Report it  to me, Adjusted Micrometer 
To home position and tested, Ok to use. 


From jasonlin at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-12-16 02:24:17: System Resetting
Message-ID: <12869632.56.1355653458158.JavaMail.coral@shine>

System tries to reset itself, but it fails.


From vilanova at snf.stanford.edu  Sun Dec 23 08:59:17 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sun, 23 Dec 2012 16:59:17 -0000
Subject: Shutdown karlsuss2 SNF 2012-12-16 02:24:17: System Resetting
Message-ID: <11716099.20.1355760904422.JavaMail.coral@shine>

Y Micrometer Got moved out of the socket, Re attached micrometer and tested, Everything Ok , Ready to use.