Problem karlsuss2 SNF 2012-11-23 19:23:53: chuck T coordinate out of range

[lagous at snf.stanford.edu]

It sudenly gave an error of overcurrent and vacuum died, dropping the mask on the wafer. Got the wafer and mask safely out and the machine went in an initialization kind of mode asking to load again. then it gave an error onthe t coordinate of the chuck. It won't react to any button.