Problem karlsuss2 SNF 2012-11-23 19:23:53: chuck T coordinate out of range

lagous at snf.stanford.edu lagous at snf.stanford.edu
Sun Dec 23 08:59:17 PST 2012


It sudenly gave an error of overcurrent and vacuum died, dropping the mask on the wafer. Got the wafer and mask safely out and the machine went in an initialization kind of mode asking to load again. then it gave an error onthe t coordinate of the chuck. It won't react to any button.



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