Problem karlsuss2 SNF 2012-11-23 19:23:53: chuck T coordinate out of range

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 08:59:17 PST 2012


Re Initialized the system and Inserted mask, Exposed a wafer, System
Working FIne, No Overcurrent Problem. Ok to use. 



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