Problem karlsuss2 SNF 2012-02-14 16:19:32: Wafer centering is off

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Feb 14 16:19:32 PST 2012


Usually we have the Mocrometer set at 10 for both X and Y
I noticed the wafer will come out shifted to left with flat toward you.
when I adjusted the micrometer to 13 , that took care of it.
I still have not had a chance to do second layer test on the system.
There was an issue before shut down.




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