From vilanova at snf.stanford.edu Mon Jul 2 07:34:53 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Jul 2012 07:34:53 -0700 Subject: Shutdown karlsuss2 SNF 2012-06-30 16:47:03: Overcurrent error Message-ID: If people Moved Micrometer away From the Limit Sensor The machine will Give an "overcurrent Error" this usually happens During Alignment On Pieces ( I found the pieces Chucks On the tool ) Re Initialized system and Exposed Wafers, System tested Ok to use. From amoini at snf.stanford.edu Sat Jul 7 11:39:54 2012 From: amoini at snf.stanford.edu (amoini at snf.stanford.edu) Date: Sat, 7 Jul 2012 11:39:54 -0700 Subject: Comment karlsuss2 SNF 2012-07-07 11:39:54: overcurrent + moving timeout Message-ID: Friday July 6 - overcurrent error. Mario restarted the tool. Immediately afterwards after exposure it gave a "moving timeout" and I couldn't do anything--wafer and mask were stuck in the tool. Another user did a hard shutdown of the tool and after that it worked fine. From vilanova at snf.stanford.edu Tue Jul 10 08:44:54 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jul 2012 08:44:54 -0700 Subject: Comment karlsuss2 SNF 2012-07-10 08:44:53: Lamp Calibration Completed Message-ID: Uniformity = 2.6% Intensity average = 15Mw/cm2 From nxs4059 at snf.stanford.edu Wed Jul 11 11:52:29 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Wed, 11 Jul 2012 11:52:29 -0700 Subject: Shutdown karlsuss2 SNF 2012-07-11 11:52:28: overcurrent & mechanism failure Message-ID: got an "overcurrent" which dropped my mask, then while following the instructions, the machine claims there is a mechanism failure and resets in a loop From gsosa at snf.stanford.edu Wed Jul 11 12:31:23 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jul 2012 12:31:23 -0700 Subject: Shutdown karlsuss2 SNF 2012-07-11 11:52:28: overcurrent & mechanism failure Message-ID: DId a system reset. Tested basic operation with a mask and wafer- OK From popomoo at snf.stanford.edu Sat Jul 28 11:26:46 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 28 Jul 2012 11:26:46 -0700 Subject: Problem karlsuss2 SNF 2012-07-28 11:26:45: Reset mechancis failed Message-ID: From felixcho at snf.stanford.edu Sat Jul 28 21:15:05 2012 From: felixcho at snf.stanford.edu (felixcho at snf.stanford.edu) Date: Sat, 28 Jul 2012 21:15:05 -0700 Subject: Problem karlsuss2 SNF 2012-07-28 21:15:04: Mechanical problem Message-ID: Dear labmembers, Karlsuss 2 seems to be under a mechanical problem. It doesn't work with mask changes or load operations but shows a mechanical problem message on the panel over again. I'm not sure it is due to the sticky tape attached on the vacuum plate where wafers are usually put on but I didn't try to remove it thinking my immature handling might cause another problem. It will be appreciated if a more experienced user or a staff member take a look at this and resolve the problem. Thanks. From bchui at snf.stanford.edu Sun Jul 29 22:37:44 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 29 Jul 2012 22:37:44 -0700 Subject: Shutdown karlsuss2 SNF 2012-07-29 22:37:43: Needs a reset Message-ID: I found the machine down on Saturday PM--"reset mechanics failed". Needs a reset. Status should have been red-light instead of yellow-light. Red-lighting it now. From vilanova at snf.stanford.edu Mon Jul 30 06:49:30 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2012 06:49:30 -0700 Subject: Problem karlsuss2 SNF 2012-07-28 11:26:45: Reset mechancis failed Message-ID: Theta Got Moved Away From Sensor Limit Therefore the System Got Into a " Mechanical Fails" Moved Theta Back To center Initialized System and Tested, Removed Yellow Tape From Chuck ,Cleaned Chuck and Tested System , All Operations Ok Good to use. From vilanova at snf.stanford.edu Mon Jul 30 06:49:36 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2012 06:49:36 -0700 Subject: Problem karlsuss2 SNF 2012-07-28 21:15:04: Mechanical problem Message-ID: Theta Got Moved Away From Sensor Limit Therefore the System Got Into a " Mechanical Fails" Moved Theta Back To center Initialized System and Tested, Removed Yellow Tape From Chuck ,Cleaned Chuck and Tested System , All Operations Ok Good to use. From vilanova at snf.stanford.edu Mon Jul 30 06:49:42 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2012 06:49:42 -0700 Subject: Shutdown karlsuss2 SNF 2012-07-29 22:37:43: Needs a reset Message-ID: Theta Got Moved Away From Sensor Limit Therefore the System Got Into a " Mechanical Fails" Moved Theta Back To center Initialized System and Tested, Removed Yellow Tape From Chuck ,Cleaned Chuck and Tested System , All Operations Ok Good to use.