Shutdown karlsuss2 SNF 2012-06-30 16:47:03: Overcurrent error

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 2 07:34:53 PDT 2012


If people Moved Micrometer away From the Limit Sensor The machine 
will Give an "overcurrent Error" this usually happens During Alignment On Pieces ( I found the pieces Chucks On the tool ) Re Initialized 
system and Exposed Wafers, System tested Ok to use. 




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