Comment karlsuss2 SNF 2012-07-07 11:39:54: overcurrent + moving timeout

amoini at snf.stanford.edu amoini at snf.stanford.edu
Sat Jul 7 11:39:54 PDT 2012


Friday July 6 - overcurrent error. Mario restarted the tool. Immediately afterwards after exposure it gave a "moving timeout" and I couldn't do anything--wafer and mask were stuck in the tool. Another user did a hard shutdown of the tool and after that it worked fine.




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