Problem karlsuss2 SNF 2012-07-28 21:15:04: Mechanical problem

felixcho at felixcho at
Sat Jul 28 21:15:05 PDT 2012

Dear labmembers, 
Karlsuss 2 seems to be under a mechanical problem.
It doesn't work with mask changes or load operations
but shows a mechanical problem message on the panel over again. 
I'm not sure it is due to the sticky tape attached on the 
vacuum plate where wafers are usually put on 
but I didn't try to remove it thinking my immature handling might 
cause another problem. It will be appreciated if a more experienced
user or a staff member take a look at this and resolve the problem. 

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