Shutdown karlsuss2 SNF 2012-06-30 16:47:03: Overcurrent error

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sat Jun 30 16:47:03 PDT 2012


In between exposing two wafers, the machine suddenly gave an overcurrent error.  I followed the instructions on the display and pressed LOAD 2 times, but it still wasn't able to restart or reset.




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