From mahnaz at snf.stanford.edu Wed Mar 14 11:28:39 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Mar 2012 11:28:39 -0700 Subject: Problem karlsuss2 SNF 2012-02-14 16:19:32: Wafer centering is off Message-ID: we are back to 10 on the micrometer on both x any y to center the chuck. sysytem has been adjusted. From mahnaz at snf.stanford.edu Wed Mar 14 11:29:10 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Mar 2012 11:29:10 -0700 Subject: Problem karlsuss2 SNF 2011-11-28 17:37:09: Lamp Intensity Message-ID: From lindaw at snf.stanford.edu Wed Mar 14 12:59:27 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 14 Mar 2012 12:59:27 -0700 Subject: Problem karlsuss2 SNF 2012-03-14 12:59:26: lamp power supply beeping during exp Message-ID: The power supply is beeping during exposure, but the lamp power seems to be ok at 14.9 - 15.0 mW/cm2. From vilanova at snf.stanford.edu Wed Mar 14 13:25:24 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2012 13:25:24 -0700 Subject: Comment karlsuss2 SNF 2012-03-14 13:25:23: System has been calibrATED Message-ID: Calibration Results : Average Intensity = 15Mw/Cm2 Uniformity = 1.72% No more beeping While Exposing , ok to use. From vilanova at snf.stanford.edu Wed Mar 14 13:25:35 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2012 13:25:35 -0700 Subject: Problem karlsuss2 SNF 2012-03-14 12:59:26: lamp power supply beeping during exp Message-ID: Calibration Results : Average Intensity = 15Mw/Cm2 Uniformity = 1.72% No more beeping While Exposing , ok to use. From maxms at snf.stanford.edu Fri Mar 16 18:47:35 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Fri, 16 Mar 2012 18:47:35 -0700 Subject: Problem karlsuss2 SNF 2012-03-16 18:47:34: broken Message-ID: says that a dangerous condition occured, so it re-started... currently asking questions about how to reconfigure. my mask is stuck in it. whoever fixes it, please put my mask in the clear mask holder ontop of the keyboard. thanks. From vilanova at snf.stanford.edu Mon Mar 19 07:48:03 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Mar 2012 07:48:03 -0700 Subject: Problem karlsuss2 SNF 2012-03-16 18:47:34: broken Message-ID: Everything thing Looks Normal On the display panel , Someone Else Removed The users mask, Put my mask and exposed wafers to make sure everything was fine, System Working normal, I couldnt repeat the user Problem ,ok to use. From mahnaz at snf.stanford.edu Mon Mar 19 11:56:36 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 19 Mar 2012 11:56:36 -0700 Subject: Shutdown karlsuss2 SNF 2012-03-19 11:56:35: time out Message-ID: not letting me unload users wafers. From mahnaz at snf.stanford.edu Mon Mar 19 12:02:02 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 19 Mar 2012 12:02:02 -0700 Subject: Shutdown karlsuss2 SNF 2012-03-19 11:56:35: time out Message-ID: not sure , what happend? when shut down the system it released the wafer. system need to be looked at. From lichenkolo at snf.stanford.edu Wed Mar 21 15:35:05 2012 From: lichenkolo at snf.stanford.edu (lichenkolo at snf.stanford.edu) Date: Wed, 21 Mar 2012 15:35:05 -0700 Subject: Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10 Message-ID: wafer chuck is shifted to the right with X-micrometer set to 10. the shift is about 2-3mm From gsosa at snf.stanford.edu Thu Mar 22 10:08:53 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 10:08:53 -0700 Subject: Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10 Message-ID: Checked X micrometer reading vs X stage position. Centered stage and adjusted micrometer head to read 10 on scale. Tested operation. All OK. From gsosa at snf.stanford.edu Fri Mar 23 09:31:49 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Mar 2012 09:31:49 -0700 Subject: Comment karlsuss2 SNF 2012-03-23 09:31:48: Scheduled lamp change Message-ID: Replaced and set up UV lamp. Calibrated exposure. Uniformity: 1.4%, Ave Intensity 15.14 mw/cm2 From lindaw at snf.stanford.edu Wed Mar 28 11:22:51 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 28 Mar 2012 11:22:51 -0700 Subject: Comment karlsuss2 SNF 2012-03-28 11:22:50: lamp power supply beeping at exposure Message-ID: lamp beeps at beginning of 8 sec exposure for ~4 sec, then stops beeping for the rest of the exposure. Output is 15.0mW From gsosa at snf.stanford.edu Thu Mar 29 12:38:54 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Mar 2012 12:38:54 -0700 Subject: Comment karlsuss2 SNF 2012-03-28 11:22:50: lamp power supply beeping at exposure Message-ID: Checked and calibrated exposure.