Problem karlsuss2 SNF 2012-02-14 16:19:32: Wafer centering is off

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Mar 14 11:28:39 PDT 2012


we are back to 10 on the micrometer on both x any y to center the chuck. sysytem has been adjusted.




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