Shutdown karlsuss2 SNF 2012-03-19 11:56:35: time out

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Mar 19 12:02:02 PDT 2012

Previous message: Shutdown karlsuss2 SNF 2012-03-19 11:56:35: time out
Next message: Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

not sure , what happend? when shut down the system it released the wafer. system need to be looked at.

Previous message: Shutdown karlsuss2 SNF 2012-03-19 11:56:35: time out
Next message: Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the karlsuss2-pcs mailing list