Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10

lichenkolo at snf.stanford.edu lichenkolo at snf.stanford.edu
Wed Mar 21 15:35:05 PDT 2012


wafer chuck is shifted to the right with X-micrometer set to 10.
the shift is about 2-3mm




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