Problem karlsuss2 SNF 2012-03-21 15:35:04: wafer chuck is not centered with X-micrometer set to 10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Mar 22 10:08:53 PDT 2012


Checked X micrometer reading vs X stage position. Centered stage and adjusted micrometer head to read 10 on scale. Tested operation. All OK.




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