[karlsuss2-pcs] Problem karlsuss2 SNF 2013-04-25 15:33:08: Loose focus when load wafer

mahnaz at stanford.edu mahnaz at stanford.edu
Thu Apr 25 15:33:09 PDT 2013


Mask was in full focus , few times when loaded the wafers totally went 
out of focus.
once in a while it feels like that the chuck scrapping against the side 
panels.


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