From lwhittel at comcast.net  Tue Feb  5 14:19:51 2013
From: lwhittel at comcast.net (lwhittel at comcast.net)
Date: Tue, 5 Feb 2013 14:19:51 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-05 14:19:51: CI1 lamp
 output only 7.1 mW/cm2
Message-ID: <31054561.62.1360102791815.JavaMail.coral@snc-coraldb.stanford.edu>

should be 15.0

From vilanova at stanford.edu  Wed Feb  6 08:16:53 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Wed, 6 Feb 2013 08:16:53 -0800 (PST)
Subject: [karlsuss2-pcs] Shutdown karlsuss2 SNF 2013-02-06 08:16:52: Monthly
 lamp and calibration in progress....
Message-ID: <17495884.76.1360167413138.JavaMail.coral@snc-coraldb.stanford.edu>

Monthly lamp and calibration in progress....

From vilanova at stanford.edu  Wed Feb  6 09:24:05 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Wed, 6 Feb 2013 09:24:05 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-05 14:19:51: CI1
 lamp output only 7.1 mW/cm2
Message-ID: <15758462.78.1360171445077.JavaMail.coral@snc-coraldb.stanford.edu>

Monthly Lamp Calibration Completed
Average intensity = 15Mw/Cm2
Uniformity = 1% 

From vilanova at stanford.edu  Wed Feb  6 09:24:11 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Wed, 6 Feb 2013 09:24:11 -0800 (PST)
Subject: [karlsuss2-pcs] Shutdown karlsuss2 SNF 2013-02-06 08:16:52:
 Monthly lamp and calibration in progress....
Message-ID: <17936249.79.1360171451101.JavaMail.coral@snc-coraldb.stanford.edu>

Monthly Lamp Calibration Completed
Average intensity = 15Mw/Cm2
Uniformity = 1% 

From lwhittel at comcast.net  Wed Feb  6 13:01:51 2013
From: lwhittel at comcast.net (lwhittel at comcast.net)
Date: Wed, 6 Feb 2013 13:01:51 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-06 13:01:50: loss of
 wafer vacuum error
Message-ID: <28811475.85.1360184511046.JavaMail.coral@snc-coraldb.stanford.edu>

ran 6 wafers, all got loss of wafer vacuum error.  checked the backs of wafers after the 1st error, they are clean. wiped the chuck with acetone, it is clean.  Load a wafer and press enter.  The chuck vacuum is on and holding the wafer firmly before pushing the tray in.  during WEC, a louder than normal hissing sound coming from under the chuck area, then get a "loss of wafer vacuum" error message.  Pressed enter to continue, exposure sequence from that point appears to be normal.  

From vilanova at stanford.edu  Wed Feb  6 14:33:25 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Wed, 6 Feb 2013 14:33:25 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-06 13:01:50: loss
 of wafer vacuum error
Message-ID: <7305838.88.1360190005904.JavaMail.coral@snc-coraldb.stanford.edu>

I've reseted the tool and tested , There is a user on the tool right now
 and he is not having any issues with it.
Please clean the chuck Sometimes gets dirty specially if youre using 
thick resist ok to use

From gsosa at stanford.edu  Tue Feb 12 07:40:34 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:40:34 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-04-23 11:10:43:
 Scheduled lamp change 4/23
Message-ID: <30610636.3.1360683634154.JavaMail.coral@snc-coraldb.stanford.edu>

To Archive

From gsosa at stanford.edu  Tue Feb 12 07:40:38 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:40:38 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-03-23 09:31:48:
 Scheduled lamp change
Message-ID: <10120123.4.1360683638175.JavaMail.coral@snc-coraldb.stanford.edu>

To Archive

From gsosa at stanford.edu  Tue Feb 12 07:40:45 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:40:45 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-03-14 13:25:23:
 System has been calibrATED
Message-ID: <25584663.5.1360683645201.JavaMail.coral@snc-coraldb.stanford.edu>

To Archive

From gsosa at stanford.edu  Tue Feb 12 07:40:50 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:40:50 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2011-12-07 14:19:02:
 Scheduled lamp change
Message-ID: <12990926.6.1360683650223.JavaMail.coral@snc-coraldb.stanford.edu>

To Archive

From gsosa at stanford.edu  Tue Feb 12 07:40:55 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:40:55 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2011-11-17 11:12:19: Lamp
	calibration
Message-ID: <26074184.7.1360683655245.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:02 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:02 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-05-11 09:06:45:
 Monthly Lamp Change and calibration Completed
Message-ID: <27794389.8.1360683662272.JavaMail.coral@snc-coraldb.stanford.edu>

To Archive

From gsosa at stanford.edu  Tue Feb 12 07:41:07 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:07 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-05-14 07:27:22:
 Someone Moved Y Micrometer out of the socket
Message-ID: <11877170.9.1360683667294.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:13 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:13 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-06-05 14:48:16:
 Plating tape left on vacuum chuck
Message-ID: <4151483.10.1360683673319.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:27 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:27 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-06-13 11:12:59:
 RePlAcEd BrOkEn BsA LiGhT BuLb
Message-ID: <5206435.11.1360683687357.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:31 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:31 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-06-15 12:06:23:
 Plating tape left on vac chuck
Message-ID: <29561818.12.1360683691379.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:35 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:35 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-06-29 09:30:27: Lamp
	change 6/28
Message-ID: <10759217.13.1360683695400.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:39 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:39 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-07-07 11:39:54:
 overcurrent + moving timeout
Message-ID: <73109.14.1360683699420.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:43 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:43 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-07-10 08:44:53: Lamp
 Calibration Completed
Message-ID: <9366902.15.1360683703441.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:41:54 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:41:54 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-08-07 08:56:49: Lamp
 Change and Calibration Completed
Message-ID: <23686732.16.1360683714475.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:42:00 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:42:00 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-10-26 09:33:45:
 Monthly Lamp And Calibration Completed
Message-ID: <33020888.17.1360683720501.JavaMail.coral@snc-coraldb.stanford.edu>

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From gsosa at stanford.edu  Tue Feb 12 07:42:07 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Feb 2013 07:42:07 -0800 (PST)
Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2012-11-28 08:51:56:
 Monthly lamp changed and calibrated
Message-ID: <3748199.18.1360683727527.JavaMail.coral@snc-coraldb.stanford.edu>

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From lwhittel at comcast.net  Thu Feb 14 12:00:58 2013
From: lwhittel at comcast.net (lwhittel at comcast.net)
Date: Thu, 14 Feb 2013 12:00:58 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-14 12:00:57: lamp
 power supply beeping: output 14.7
Message-ID: <7003951.88.1360872058189.JavaMail.coral@snc-coraldb.stanford.edu>

The lamp power supply is beeping during exposure, and the lamp output is reading 14.7 instead of 15.0.

From vilanova at stanford.edu  Thu Feb 14 13:34:05 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Thu, 14 Feb 2013 13:34:05 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-14 12:00:57: lamp
 power supply beeping: output 14.7
Message-ID: <21866133.94.1360877645300.JavaMail.coral@snc-coraldb.stanford.edu>

Recalibrated lamp power supply
Output 15.0Mw./Cm2

From chienyuc at stanford.edu  Wed Feb 20 18:34:17 2013
From: chienyuc at stanford.edu (chienyuc at stanford.edu)
Date: Wed, 20 Feb 2013 18:34:17 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-20 18:34:17: Machine
	reset fail
Message-ID: <7449075.38.1361414057679.JavaMail.coral@snc-coraldb.stanford.edu>

After a few exposure it jumped into warning state and restarted.  But stuck in starting phase and needed to be reset.

From vilanova at stanford.edu  Thu Feb 21 07:51:53 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Thu, 21 Feb 2013 07:51:53 -0800 (PST)
Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-02-20 18:34:17:
	Machine reset fail
Message-ID: <15873169.4.1361461913572.JavaMail.coral@snc-coraldb.stanford.edu>

Someones reseted it , When I came in everything was Fine , there was a user On the system and everything went well for him.